Regulator for 2 MPa ARX 20

Regulator Options None Nil 1348112 G36 10 01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included

SI unit for DeviceNet TM

Class Instance Attribute Description Value 01h (01) 01h (01) MAC ID (Node address) 0 to 63 03h 0: 125 kbps 1: 250 kbps 2: 500 kbps (DeviceNetTM) 01h (01) 02h (02) Baud_rate (Communication speed) : The address and communication speed set in SW mode will be kept even after the DeviceNetTM communication power supply to the SI unit is turned off.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Refer to pages 15-8-3 and 15-8-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-10-1 2 Series ASP How to Order ASP 3 30F 01 06 S Pilot check valve With seal Body size Applicable tubing O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

Compact Proportional Solenoid Valve Series PVQ

%' 13 O-ring ( 14 Option (Body ported only) Bracket assembly: VDW20-15A-1 O-ring ( Sub-plate Part No. -01 PVQ30-15 P (1) A (2) Thread type Material C S !%' '

D

AS1F-D Series Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type How to Order AS 2 2 1 1 F 01 06 S D Body size Type adjustable by flat head screwdriver AS-F 1 2 3 4 M5 standard With seal 1/8, 1/4 standard 3/8 standard 1/2 standard Note) In the case that port size is either M5 or 10-32 UNF thread, it is not available with seal.

NARM Ser ies

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Multi Channel Pressure Sensor Controller

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) 48 conversion adapter (Model: ZS-26-D) : The panel mount adapter can be rotated by 90 degrees for mounting. : Front panel of this Controller meets IP65 (if 48 conversion adapter is used, it meets IP40).

SI unit for EtherCAT

Specification Seal cap EX9-AWTS For M12 connector socket: 10 pcs. -29No.EX-OMN0011-F Power supply connector (1) Cable with power supply connector Part number: EX500-AP0 1 0S Connector specifications S Straight A Angle Cable length (L) 1 1000 [mm] 5 5000 [mm] EX500-AP0#0-S EX500-AP0#0-A Item Specifications Pin No.

SI unit for PROFINET

Specification Seal cap EX9-AWTS For M12 connector socket: 10 pcs. -35No.EX-OMO0030-E Power supply connector (1) Cable with power supply connector Part number: EX500-AP0 1 0S Connector specifications S Straight A Angle Cable length (L) 1 1000 [mm] 5 5000 [mm] EX500-AP0#0-S EX500-AP0#0-A Item Specifications Pin No.

Mist Separator

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

LUBRICATOR

Before using an SMC fitting and S coupler, please refer to "Tightening the threaded portion of the connection thread" of the Fittings & Tubing Precautions. Increase the cylinder volume in relation to the tube capacity between the solenoid valve and the cylinder.

MIST SEPARATOR

HOW TO ORDER AFM 30 03 BD 1N A F 1 3 4 5 2 1 Symbol Description Body size 20 30 40 Nil Rc N NPT F G 2 Thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 3 Port size Nil Without mounting option B With bracket a Mounting Option Nil Without auto drain C With float type auto drain (N.C.)

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Lubricator

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.

3M/SMseries

Pilot Solenoid Valve Compact Size/Large Ffow Cv 1.0 2.s Body Ported/Base Mounted Configurations Wide Array of Electrical Entries Low Power Consumption: 1.8 WDC NVF3OOO,5OOO Index 5 Port Pilot Type Solenoid Valve Series NVF Series NVF3OOO I O) Large flow capacity, compact size.

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).