EXxx-OMN0035CN

Bit 11 Bit 13 Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit

Air cylinder (Series compatible with secondary batteries)

{Refer to Table 9} It same for mounting bracket {Refer to Table 11 (P21)} Short Long Fig. 6 Tie rod installation condition 1 3 5 Table 9. Tightening torque Bore size Socket Tightening torque[Nm] 40,50 13 (M8) 7.4 63 17 (M10) 20 80,100 19 (M12) 29 2 4 Tie rod tightening order. 18 3-2-2.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

JXCx-OMT0028CN

0.01mm 700.00mm 7016 00011170h PLC 00 01 11 70 h 2)-700.00mm GW [OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address.6 FEh FFh 15bit 8bit 7bit 0bit (H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh

1.63

9, @0, @1 20 25 32 40 50 63 Set of nos. above !8, !9, @0, @1 MGP20-Z-PS MGP25-Z-PS MGP32-Z-PS MGP40-Z-PS MGP50-Z-PS MGP63-Z-PS Seal kit includes !8 to @1. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

31.5 24.5 16.5 3 2.5 4 36 23.4 mounting hole 9 6.5 6.5 47.5 10.5 Foot bracket 15.4 16.7 PE port For the bracket assembly model, refer to page 4-14-19.

Precision Cylinder Series MTS

4.5 4.5 6.5 3.5 2-M3 x 0.5 (port size) 2-M3 x 0.5 (port size for axial piping type MTS8-P) 9 2-M3 x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part number: MT-S8 Rod end nut

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

IDX-OM-W011

K 9 K IDF6E/8E/11E/15E1 9-1 ( ) 9-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDF6E/8E/11E/15E1-*-K N.O. () 0.151.6MPa IDF Series 9-1 9 1 IDX-OM-W011 9 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDF Series 9-2 9 2 IDX-OM-W011 10 L 10 L IDF4E/6E/8E/11E/15E1 10-1 ( ) 10-2 1.6MPaADH4000

IDX-OM-W026

K 9 K IDF22E/37E 9-1 ( ) 9-2 1.6Mpa AD48-8-A-X2112 10mm KQ2L10-02AS IDF22E-*-K IDF37E-*-K 0.151.6 N.O. () IDF Series 9-1 9 1 IDX-OM-W026 9 K AD48-8-A-X2112 1 C42FP-260S 1 111692 1 1 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 SMC WEB IDF Series 9-2 9 2 IDX-OM-W026 10 L 10 L 10-1 ( ) 10-2 1.6MPaADH4000-04 IDF22E-**-L IDF37E-**-L IDF55E-**-L IDF75E-**-L 0.151.6 ) N.O

IDX-OM-W017

K 9 K 4-2 9-1 1. 1 2 2. 3.

EXxx-OMN0027CN

8 98 9 9 99 0 0 100 0 1 101 ON 2 5 125 0 126[SF][BF]LED -19No.EX-OMN0027CN-D V_SEL SI Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte HOLD/CLEAR Settings1 4 OFF OFF() ON /() -20No.EX-OMN0027CN-D Terminator PROFIBUS DP ON OFF() OFF PROFIBUS DP [ON] A Settings1 3567(ON) Settings1 7 ON LED OFF -21No.EX-OMN0027CN-D LED LED ST(M) PWR PWR

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Series VQ Metal Seal/Rubber Seal Body Ported

Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink White Black Black Red Red Red Black Black 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 As in the case of 26 pin models (standard), terminal No.1 is the first station SOL.A and the last two terminal numbers are used for COM.

Speed Controller with One-touch Fitting

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-03(S)A 5/32" 8.2 AS221F-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS221F-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS221F-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-

SMC Pneumatic Clean Series

27 H1 H FF 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 8 8 40 32 25 20 15 15 6 6 5 17 17 13 6 6 42.5 34.5 30 24 24 22 22 18 37.5 29 29 29 21 19.5 19.5 15.5 14 12 10 8 30.4 104 78 76 76 M6 x 1 depth 11 M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !3 i o MG CX y u Dy -X 20Data CY1F15 Detailed view of driving cylinder CY1F25 Detailed view of driving cylinder Section A-A' Note Component Parts Material Nickel plated Zinc chromated Description Body (rodless cylinder) Body End cover A End cover B Cylinder tube Description No. Note No.

Slit Valve

Description Part number Material Corresponding model XL XGT22-32XGT0101-2-1S Gate 1 A6063 XGT22-46236XGT0402-2-1S XLQ FKM XGT200-9-13S XGT22-32XM XY Kalrez 4079 XGT200-9-14S O-ring (Gate) 2 FKM XGT200-9-7S XGT22-46236Kalrez 4079 XGT200-9-9S DXGT22Wiper 3 XGT200-4-9S O-ring (Body opening side) 4 FKM XGT200-9-12S XSA XGT22O-ring (Bonnet assembly) 5 XGT200-9-11S XGT22Holding bolt 6 Stainless

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Multi-Axis Step Motor Controller

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 3 Shield Vcc B-4 GND A-4 A B-5 A A-5 B B-6 B A-6 Signal Connector B terminal no. Lock (+) B-1 Lock () A-1 Sensor (+) B-3 Sensor () A-3 Red 4 Black 5 Brown 1 Blue 2 17