Size: 1/8, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Bracket, Option 1: -, Option 2: -

Size: 1/8, Thread: G, Port Size: 1/4, Accessory: Bracket, Option 1: -, Option 2: -

Size: 1/8, Thread: G, Port Size: 1/8, Accessory: -, Option 1: -, Option 2: -

Size: 1/8, Thread: M Thread, Rc(PT), Port Size: 1/8, Accessory: Bracket, Option 1: -, Option 2: -

Size: 1/8, Thread: G, Port Size: 1/8, Accessory: Bracket, Option 1: -, Option 2: -

Air Suction Filter

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs.

ZSE3/ISE3

Detaching To detach a socket from connector, pull out lead wire while pressing the socket's hook with a stick having a thin tip (about. 1 mm). If the socket will be used again, first spread the hook outward. Pressure exceeding 0.5 MPa is being applied. (The pressure over rated pressure is being applied in case of positive pressure.) Reset the supply pressure less than 0.5 MPa.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Table of Contents

Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Vacuum Unit

B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC(

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Process Pump

Diaphragm Assembled in a clean room.

BP1000

A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

ZSE30/ISE30

When a surge generating load such as a relay or solenoid is directly driven, use a type of switch with a built-in surge absorbing element. 4. Since the type of applicable fluid varies depending on the product, be sure to verify the specifications. The switches do not have an explosion proof rating. To prevent a possible fire hazard, do not use with flammable gases or fluids. 5.

25

Diaphragm Assembled in a clean room.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

port} (A) 2 N.C.

VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.