One-touch Fittings

type 8 to 16 4, 6 M M L Release button dimensions X X *1: D is maximum diameter.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-C PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40-(F,N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D VHS20W-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30W-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40W-(F,

Precision Regulator

Setting knob Setting spring Diaphragm (A) Fixed orifice Flapper Diaphragm( B) Nozzle Diaphragm (C) SUP.side passage BLEED Exhaust valve Exhaust OUT SUP Main valve Valve guide F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(B) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.

51

Foot: CG3LN Bore size Stroke S+ Stroke H t (Clearance)1 GB GA 2 x P Width across flats NA With rubber bumper 8 x J Rod part A MM AL I H1 C Width across flats B1 B (LT) 15 LH H2 D W Width across flats KA W 2 x LC (Knock pin position) C Y X M 4 x LD X Y LX LZ Sectional view of the rod part LS+ Stroke ZZ+ Stroke Z 1 The rod end nut should be mounted in the position t (clearance) so that it will

Plate Cylinder with Lock Series MLU

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Thermo-con/Rack Mount Type

Circulating device Users equipment L 0.8 x 3 x 1 x 103 x 4.2 x 103 = T = T2 T1 60 x 1000 = 167 W T1: Outlet temperature 200 W Cooling capacity = Considering a safety factor of 20%, 167 W x 1.2 = Example 3 When cooling the object below a certain temperature in certain period of time.

Air cooled Thermo-con (Compact type)

Length of communication cable for RS-485 shall be limited to around 500[m] in total, and that for RS232C shall be 15[m].

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Series CE1

64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X 1.25 61.5 35 19 Rc(PT) 1/4 89.5 49 60 9 M10 X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto

VCB

Made to Order Specifications Oil-free specifications VCB X10 17-2-25 6 Series VCB Construction q w e r Component Parts t Material Description No.

Multi-channel Digital Sensor Monitor ( compatible)

7 seg). (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 0x097E (2430) 0x097F (2431) 0x0980 (2432) 0x0981 (2433) 5 R/W Line name

High-precision Digital Pressure Switch

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -8No.PS-OMW0002-C Summary of Product parts Names of individual parts Body Power supply/ output connectors: Connects the power supply/ output lead wire. Operation/Display: Refer to the table below.

AR20-B to AR60-B

Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J

Digital Flow Switch ( compatible)

(page 88) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

4-channel Flow Monitor ( compatible)

W Line name 9th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot

Peltier-type Chiller Thermo-con/ Compact Type

Cooling capacity = Considering a safety factor of 20%, 93.3 W x 1.2 = 112 W Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density : 1 x 10 3

PFxx-OMX0002

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 m u im ax 0 M 7 M 1 in e i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u an m t ad en ju m st Friction fittings Note) The diagram shows the rotation angle with a reference position set