Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

21 10 Dimensions 1 2 3 4 5 6 7 8 (mm) n L1 L2 K J 5 6 Note 2) The above dimensions are for ZQ1000M2 .

VQ7-6/7-8

3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

Compact

6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Compact Manifold Regulator

/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80 81 83 84 85 86 87 88 Note) When the knob and the OUT piping are located on the same side, the elbow fitting is directed to the rear side (DIN rail side).

New

0.3 0.1 1.0 0.3 0.1 5/64 2 3 5 2 3 5 4 7 4 7 5 8 10 5 8 10 0.82 1.25 1.45 0.82 1.81 2.11 1.69 3.14 1.68 3.54 2.50 2.77 5.69 2.50 2.56 5.69 0.44 0.34 0.43 0.44 0.40 0.32 0.40 0.34 0.49 0.36 0.44 0.82 0.46 0.44 0.88 0.64 0.23 0.35 0.40 0.23 0.41 0.56 0.47 0.84 0.50 0.90 0.70 1.22 1.54 0.70 1.38 1.76 145 85 29 145 85 29 145 21 145 21 145 43 14 145 43 14 220 220 220 220 220 220 340 340 340 340

48

5 o Component Parts Description No.

JXCx-OMU0004

CN1P.17 4.2 CN2CN3: LE-CP-LE-CP---S CN3 CN2 4.3 CN4I/O PLC I/O CN4 PLC *6.4 I/O P.23 *6.3 P.21 16 No.JXC-OMU0004-A 5.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

pin) B code IN 3 With DIN rail bracket (SY/JSY valve) 3 7/8 inch (5 pin) IN 4 M12 (4 pin/5 pin) A code IN/OUT (PIN layout 1) 5 M12 (4 pin/5 pin) A code IN/OUT (PIN layout 2) : Refer to Connector Pin No.

Rotary Actuator

PRODUCT NAME Rotary Actuator MODEL / Series / Product Number CRA1 30~100 1 - Contents Safety Instructions 2 Outline 17 Specification 17 Effective torque 18 Rotation range of Keyway 19 Internal structure and parts description 20 Rotary actuator internal structure 20 Basic circuit for using rotary actuator 21 Circuit configuration 21 Recommended Devices 21 Mounting 22 Restriction of the load

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

5 5 5 16 16 16 16 16 16 15 21 21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm

MY2

5@8 @7 %5!

Safety Instructions

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to main text for more detailed precautions on every series. 5. Set the pressure of the compressed air to zero before an inspection.

Air Slide Table Series MXP

5 5 5 5 A A 3 3 3.5 3 3 MXH A B MXU Minimum Auto Switch Mounting Stroke Electrical entry from inside (mm) MXS B C Applicable auto switch model No. of auto switches mounted MXQ D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV MXF 1 pc. 2 pcs. 5 10 5 10 5 5 B D MXW MXJ Parallel electrical entry B A Auto Switch Mounting MXP MXY Caution MTS A D Auto Switch Mounting Tool Use the watchmakers screwdriver with

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

SFOD-OMT0005CN

2) LEC-T1-3G *1 *2 http://www.smcworld.com/ 5(P.23) 16(P.68) USB LAN -8- 2.4 () (1) (JXC-CPW) (JXC91-) 1 (JXC-CPW) 1 *1 1 *1 [] (:LEC-T1-3G) (LEC-W2) (USB ) (: P5062-5) (2) 3.4 (P.16) (3) 4.1 (IP )(P.18) (4)PLC PLC (5) 5.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

5 stations{ Item Characteristics Conductor resistance /km, 20C 65 or less Cable length (L) Assembly part no. 18 Note 6 6 stations{ 19 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 7 7 stations{ Cable 25 core x 24AWG Insulation resistance V, 1 min, AC 1000 20 5 8 stations{ 21 COM. 13 Connector terminal no.

Thermo-chiller

Cable size Crimped terminal on the thermo-chiller side Applicable model HRS100-A -20HRS100-W -204 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 HRS150-A -20HRS150-W -2040 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-A -40HRS100-W -403-phase 380 to 415 VAC (50/60

EXxx-OMO0027

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to master per unit. 2s complement 2s complement.

Vacuum Unit Ejector / Vacuum Pump System

5 Not specified Not specified 100,000 5 +7 6 +10 -19No.