3 Port Solenoid Valve/

pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 5 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

T

(mm) 8 6.5 5 4 Inner tubing I.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

EXxx-OMZ0016

Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

Ionizer Nozzle type IZN10 Series IZS

Tube I.D.: 5 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 0.05 MPa 2 2 0.1 MPa 0.3 MPa 1 1 0.1 MPa 0 0 0 100 200 300 400 500 0 100 200 300 400 500 Tube length [mm] Tube length [mm] Maximum operating pressure is 0.1 MPa. Note 1) Maximum operating pressure is 0.3 MPa. Note 1) Note 1) Refer to Cautions when using the IZN10-11(female threads for piping) on page 448.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators M5 x 0.8 (A port) 14 5 10 26.4 2 x 3.2 (For mounting) 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 28.5 26.1 R P X 13 5 5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10 10 8.6

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) Q1 = M Y L2 max Q2 L2(3 x P) Size C1 = C (mm) D5.5 to 8 10 3 Y 1 Q1 L1 max X Size 10 5.5 to 14 X 1 3 7.5 to 9 15 3, 4 Y 1.5 Y = L2 = C2 = C L1(3 x P) 15 7.5 to 18 X 1.5 3, 4 9.5 to 10 20 3, 4, 5 Y 1.5 X = L1 = 20 9 to 20 X 1.5 3, 4, 5 11 to 13 30 3, 4, 5, 6 Y 2 Q2 = M 30 11 to 22 X 2 3, 4, 5, 6 14 to 15 40 3, 4, 5, 6, 8 Y 4.5 105 Series CRBU2 Axial: Top (Long shaft side) Axial: Bottom

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

70astamb1

5 5 5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

mb1

switch model 32 40 50 63 80 100 2 (Different sides, Same side) D-Z7/Z80 Reed switch 15 25 10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 6 D-Y7BAL 5 5 5 5 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion

PF-OMN0009_C

21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4~20mA(

One-touch Fittings Series KQ2

D1 D2 L1 L2 M A 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 1 8 15.5 33 33.5 26 34.5 35.5 36.5 37.5 40.5 41.5 43 21.5 22.5 14.5 23.5 23 24.5 23.5 5 32 16 18 10.4 3 16 3.5 16.5 19.5 10 11.4 1 4 4.6 17 20.5

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.