Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 400mm, Motor Option: Lock, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 500mm, Motor Option: Lock, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 600mm, Motor Option: Lock, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 700mm, Motor Option: Lock, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 800mm, Motor Option: Lock, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 900mm, Motor Option: Lock, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 400mm, Motor Option: -, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

3 Port Air Operated Valve VPA3145/3165/3185 Series

4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2

CRJ

Connecting port position Rotation angle 90 180 90 180 Front port Nil Side port E Applicable auto switches/ Refer to pages 7 through 11 for detailed auto switch specifications. Lead wire length (m) Auto switch part no.

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

GA342

Refer to page 5-11-4.)

TA301

(Value in the initial stage) Vibration resistance: No malfunction occurs on the test with one sweep from 45 to 1000 Hz, to axis and right angle directions of main valve each time when energized and de-energized.

Clean Room Regulator/Fluoro Resin Type Series SRF30

(inch size) 11 3/8 SRF30T 11 Tubing SRF30S 07 Integral fittings Pilot port thread type Applicable tube size Inch size (Tubing size regulator port) Metric size (Tubing size regulator port) Nil N Rc1/8 NPT1/8 07 11 1/4 x 5/32 (with plug-in reducer) 3/8 x 1/4 (standard size) 6 x 4 (with plug-in reducer) 8 x 6 (with plug-in reducer) 10 x 8 (standard size) 06 08 10 Note)The reducer method allows

PSxx-OMT0001CN

9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

-segments, 7 segments for other), Sub screen (Right): 5 digits (some digits are 11-segments, 7 segments for other) Indicator light Lights up when switch output is turned ON.

ZSE30/ISE30

Then finish off by wiping with a dry cloth afterwards. 11 Series ZSE30/ISE30 Specific Product Precautions Be sure to read before handling. Refer to pages 9 through 11 for safety instructions and pressure switch precautions. Handling Mounting Warning Caution 1. Mounting with panel mount adapter 1. Do not drop, bump, or apply excessive impacts (980m/s) while handling.

ZSE2/ISE2

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. 3 m 30 5 m 50 16-6-8 3 Compact Pressure Switch Series ZSE2/ISE2 ZSE2/ISE2 Specifications ZSE2 For vacuum ISE2L For low pressure ISE2 For high pressure Operating pressure range/ Regulating pressure

Multistage Ejector Series ZL112/212 1

0 (Set no. for 9, 10 & 11) Suction filter PE End cover e !1 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 13-7-5.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.