99

30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

A B PF3W504 0 4 PF3W520 0 16 PF3W540 0 40 PF3W511 0 100 Display A Set A and B to the values shown in the table on the left.

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

Series LQ3 High Purity Fluororesin Fitting

C (E) M L H E C B L 14 20 25 29 37 49 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 10 17 22.5 24.5 27 30 4.8 6 9 10 14 18 3.5 4 5 6 7 8 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3E1A LQ3E2A LQ3E3A LQ3E4A LQ3E5A LQ3E6A M 1/4 L C H (E) Tee Union : LQ3T (mm) Inch Size 2-B Model Tubing O.D.

NCRBIBwserbs

R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 396 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for Non Plug-in Stations 10-SS5Z3-60D [With External Pilot Specifications] One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 25 13.3 13.3 25 (Pitch) P = 10.5 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 A (2) L3 H (1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS120-M5 M5 x 0.8 M5 x 0.8 8 10 28.3 10.3 9 9 25 22.2 25.5 AS120-U10/32 10-32UNF 10-32UNF AS220-01 30.5 13.2 14.3 14.6 32.4 27.4 12 (12.7) 35.5 18 1/8 1/8 AS220-02 35.3 17.5 18 19.5 34.8 29.8 17 (17.5) 27.2 40.3 1/4 1/4 AS320-03 40.8 19.7 22.5 24.3 40.6 35.6 19 30 45.8 3/8 3/8 AS420-04 42.4

Series CE1

Materials: 12, 20 Steel 32 to 63 Rolled steel 30 d (mm) Bore (mm) D C H d B C D Part No.

IDX-OM-V020

Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR

AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

HRX-OM-R028

31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Read Data1 Byte Count Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-R028 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read

Modular Type Lubricator Series AL

20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

133 14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 24 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 D Scale: 37% [With external pilot] 2-One-touch fitting (P, R ports ) Applicable tube O.D.: 8 13.3 (Pitch) P = 10.5 21.3 21.3 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

G Standard port Mounting hole Width across flats B1 I Relief port Eh8 D FY B B AL MM K NA A FX N F N FZ S + Stroke FT H ZZ + Stroke Z + Stroke 40 Standard port 2 x 7 Mounting hole Relief port (mm) H G FZ FT E F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 50 45 45 41 75 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 19.5 19.5 15.5 .

Plug-in Unit

) A B A B A B A B A A A B 143 9 9 10 143 (32) (98.8) 10 163 101 Mounting hole for 2-M5, with input block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas: L1 = 25n + 106, L2 = 25n + 241 (For 1 input block.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1

Air Cylinder

7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

IDX-OM-W094

90 Series 10-1 IDX-OM-W094 L 10.3 Rc1/225 30 5 IDFA60 2722IDFA70,IDFA80,IDFA90 22 IDFA60 (IDFA70/80/90) 1) 2830Nm 2) 10.4 1 1 IDFA60/70/80/90 Series 10-2 IDX-OM-W094 R 11 R R (GFCI) 11.1 11.2 IDFA60-23-R IDFA70-23-R IDFA80-23-R IDFA90-23-R (A) 10 15 20 30 (mA) 30 IDFA60/70/80/90 Series 11-1 IDX-OM-W094 R 11.3 M3.5 1.01.3Nm M4.0 1.42.0Nm L N () TEST () [3.2.5 ] L N IDFA60