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Note 2) Response time is based on JIS B 8375-1981. (0.5 MPa, without light/surge voltage suppressor) Note 3) For VZS250-FZ-01 Note 4) Note 1 and Note 2 are with controlled clean air.

(NPN ) () () 5 2.(NPN ) No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1 1.5Nm ( ( ( ( ) ) ) ) 2 2 2 2) ) ) )Rc Rc Rc Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 DC & & & & / / / / Best Pneumatics Best Pneumatics Best Pneumatics Best Pneumatics No. No. No.

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

/2 Rc3/4 85 355 250 Air tank Booster regulator A B C D E F G H I J K L M VBA20A VBA22A 481 444 394 Rc3/8 59 VBA20A VBA22A 531 494 444 Rc3/8 59 IN port Rc1/2 Assembly dimensions Safety valve port Rc3/4 Maintenance OUT port (J) 413 Drain port Rc1/4 IN port (I) VBAT20S1 VBA40A VBA42A VBAT38S1 VBA40A VBA42A (5) Mounting direction: When mounting the booster regulator to the air tank, the direction

Qty. 1 1 1 1 With 4 tapping screws (3 x 8) With 4 tapping screws (3 x 8) With 4 tapping screws (4 x 10) Lead wire length (3 m) For PF3W704/720/504/520 For PF3W740/540 For PF3W711/511 Bracket Note) Lead wire with M8 connector Note) For units with flow adjustment valve, 2 brackets are required. 1

0.10.83MPa 2 -560 () 3) Rc 1/8 (kg) 0.46 mm2) A 21 18.5 11 P1=0.7MPa,P2=0.5MPaS PB 18.5 22 12 mm2) AEA 40 P2=0.5MPaS BEB 36 10 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 4 4 4 4 01F D 01C COM A B 1)8 2) +COM -COM 3) D U D 1 COM A B 1)8 2) +COM -COM 3)D U D 1 11 VFR3000-OMJ0001-A () X () [3(EB) 4(EA)] ( (PE) 12 VFR3000-OMJ0001-A No. 1(ISO VG 32

/2 Rc3/4 85 355 250 Air tank Booster regulator A B C D E F G H I J K L M VBA20A VBA22A 481 444 394 Rc3/8 59 VBA20A VBA22A 531 494 444 Rc3/8 59 IN port Rc1/2 Spare port Rc1/2 Safety valve port Rc3/4 Assembly dimensions Maintenance Drain port Rc1/4 IN port (I) OUT port (J) VBAT20A1 VBA40A VBA42A VBAT38A1 VBA40A VBA42A (5) Mounting direction: When mounting the booster regulator to the air tank

How to order Accessories NIL: None Port size Note B: With Bracket (130184) G: With Pressure gauge 02 : Rc1/4 IW212:G51-2-02 IW213:G51-4-02 IW215:G51-7-02 NoteOnly one size Setting pressure 2: 0.02~0.2MPa 3: 0.02~0.3MPa 5: 0.02~0.5MPa -6- 4.

Contents Safety Instructions. 2 Outline of clean room specification. 4 Grease used. 4 2 Recommended tube diameter. 4 Raising dust characteristic. 4 21 Recommended tube diameter. 4 22 Amount of vacuum aspiration . 6 How to Order. 7 Construction. 8 1 11-LEF Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and /or equipment damage

weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube weld Pull twist knob with LOTO FV4 MV4 TW6 FV8 MV8 TW8 FV12 MV12 TW12 4) Indication of opened/closed status. 1) 2400 psig (16.5 MPa) for connection size 3/4 inch.

8 050 1/2 075 3/4 100 1 125 1 1/4 40~140F (5~60C) Ambient Temperature With Thread B W/O Thread IEC Standard IP67, JIS0920 (Water Proof, Oil Proof) Housing S T R O K E Bore Size Stroke mm (inch) inch 6 (1/4) 1/4, 3/8, 1/2, 3/4 10 (3/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 15 (5/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 D I M E N S I O N S N O S E M O U N T: NCJPB S Y M B O L S S Z With Auto Switch A C D F GA

of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : 1. 2. 3. 1. 2. 3. 4

Metric size Inch size Stations Symbol IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VN*-OMJ0001-B / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VN*-OMJ0001-B 1)-5 2) ( ( ( ( ) ) ) ) () IP IP IP IP65 65 65 65 1) 50mm 2/s 2) 3) 1) 2) 5m 3) 4) 1.5~2 2 4 VN*-OMJ0001-B 3)0.1MPa Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 2830 Rc1 3638 Rc1 1/4

Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VN-OMP0001 / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / ( ( ( ( ) ) ) ) ( ) IP54 IP54 IP54 IP54 4) 4) 4) 4) 1) 1) 1) 1) 50mm 2/s 80100 1) 1) 1) 1) 2) 2) 2) 2) 5m 3) 3) 3) 3) , , , , 4 VN-OMP0001 VNC VNC VNC VNC

Vcc Brown 4 3 2. No Connect White Power supply connector 3. GND Blue 2 4. FG Black 1. No Connect Brown 4 2. TxD White 3 Communication connector 5 3. RxD Blue 1 2 4. GND Black 5. No Connect Gray Note1) Wire color is when the option cable is used.

2 3 1 2 4 3 0.6 1.5 1.0 0.9 M5 x 0.8 90 2 position single solenoid VZ1120-M5 3-3-10 4 Port Solenoid Valve Body Ported Series VZ1000 Use as a guide for selection.

4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 173