VX31/32/33

(3/8) 02 (1/4) 03 (3/8) Table (2) Solenoid Valve Option AC Note) Note) Seal material Body material/ Shading coil material Note Note) Guide pin material Main valve poppet Coil insulation type Option symbol Fixed sealant Nil C37 Stainless steel Stainless steel DC NBR NBR G Note 1) Option S, Z are not available as surge voltage suppressor is integrated into the AC/Class B coil, as a standard

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

Motor฀Operated฀Auto฀Drain ADM200 Series

HowtoOrder 03 ADM200 1 Threadtype Operatingtime/Applicablecompressor Nil N F Rc NPT G Nil 2 sec/min (1 time/min) /3.7 to 37 kW 4 sec/min (2 times/min) /37 to 75 kW 6 sec/min (3 times/min) /75 to 110 kW 8 sec/min (4 times/min) /220 to 370 kW 4 6 8 Portsize Voltage OUT IN Symbol 04 03 3 8 3 8 100 VAC Hz 1 50 60 200 VAC Hz 50 60 240 VAC Hz 50 60 110 VAC Hz 50 60 220 VAC Hz 50 60 24 VDC 12 VDC

Series AMP

Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket Note) The bracket is not attached.

Industrial Filter FGD Series

Industrial Filter FGD Series How to Order FGD C A 03 B N 002 Made to Order Symbol Element length Description None With differential pressure indicator Symbol Nil Element length L250 L500 (L250 x 2) A B X77 With differential pressure indication switch X78 Symbol Port size Port size Rc 3/8 1/2 3/4 Accessory 03 04 06 Accessory None Bracket Symbol Nil -B Symbol Element category Symbol Element

AC20-A to AC40-A

Air Combination Air Filter + Regulator + Lubricator AC20-A to AC40-A JIS Symbol 2 1 L How to Order AC A 30 03 DG Option/Semi-standard:Selectoneeachforatom. Option/Attachment/Semi-standardsymbol:Whenmorethanone specificationisrequired,indicateinalphanumericorder.

AFJ20 to AFJ40

Vacuum Filter AFJ20 to AFJ40 Symbol Vacuum lter SP AFJ40 AFJ30 AFJ20 How to Order ZCUK AMJ AFJ 30 q 03 e 80 B T Option/Nominal ltration rating/Type/Semi-standard: Select one of each for a to f. Semi-standard: When more than one specification is required, indicate in alphanumeric order.

AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Miniature Regulator ARJ310 Series

Inch size ARJ310F-N01 5/32" 1/4" 03 07 674

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Free flow Controlled flow Weight (kg) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Critical pressure ratio Critical pressure ratio Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) 1/4 3/8 1/2 3/4 1 1 1 10 3,600 4,800 6,700 8,100 16,900 38,500 47,500 60,800 AS420-02 AS420-03 AS420-04 AS500-06 AS600-10 AS800-12 AS900-14 AS900-20 2,500 5,000 6,600 6.9 13.9 18.3 28.1

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

How to Order 2 AW X2622 30 03 Option/Semi-standard: Select one each for a to d. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

How to Order E210/310/410 Series Modular Adapter

Modular Adapter How to Order E210/310/410 Series AC-A AF-A AF-A E310 03 U AR-A Size AL-A Piping port size 210 310 410 Size 310 Port size Uni thread AW-A Symbol 410 210 01 02 03 04 1/8 1/4 3/8 1/2 AC-B Thread AF-A Uni thread U AF-A AR -A -B Specifications AL-A Model E210 E310 E410 AW -A -B Port size 3/8 1/4 1/4 1/4 3/8 1/2 1/8 AW Piping I.D. 10 8 8 8 10 12 6 AG Fluid Air Ambient and fluid

High Precision Filter for Liquids FGH Series

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Element classification Note) Port size 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

FH150

(Including O-ring for element) 5 m 10 m 20 m Model FH150-02 FH150-03 FH150-04 Element size EP910-005N EP910-010N EP910-020N 55 x 90 Note 1) The symbol at the end of the element part no. indicates the hydraulic fluid type. N: Petroleum, V: Phosphoric ester, W: Water-glycol, Emulsion (10 m only) Note 2) Refer to page 528 for micromesh elements.

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

PA3000/5000

Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N 3 5 Body only With silencer 3/8 standard 1/2 standard For AIR EXH: AN200-02 Port size Material of body wetted areas 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread

Process Pump: Automatically Operated Type (Internal Switching Type) Air Operated Type (External Switching Type) PAF3000 Series

Type Rc NPT G Symbol Nil N F Port size Port size 3/8" Symbol 03 0 PAF341 P13 Tube extension Option Actuation Note 1) Applicable actuation Automatically operated Option Symbol Air operated Symbol 0 3 Actuation Automatically operated Air operated Nil B N None With foot With silencer Tubing size When option is more than one, suffix in alphabetical order.