Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70

IC

1bit Gray 2bit Orange Output power supply voltage to pressure sensor Brown Black Input signal from pressure sensor Pressure sensor 10bit input Blue Blue Pressure sensor DC (GND) Common(GND) Note 1) IC1 (PNP open collector output type) Note 1) Connection to the pressure sensor is required only when using the external sensor type. 207 Series IC Dimensions Built-in sensor type 123 100.5 70

Delivery Pressure: R [100 to 1000 psig (0.7 to 60 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: Q [10000 psig (70 MPa)], Gauge Port, Outlet: Q [10000 psig (70 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®, Standard

Delivery Pressure: R [100 to 1000 psig (0.7 to 60 MPa)], Relieving: 1 (Self-relieving, Standard), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: Q [10000 psig (70 MPa)], Gauge Port, Outlet: Q [10000 psig (70 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material:

High-precision Digital Pressure Switch

The operating fluid temperature should be -5 to 70 C, and the ambient temperature should be -5 to 50 C. Operation under low temperature (5 C or less) leads to cause damage or operation failure due to frozen moist in the fluid or air. Protection against freezing is necessary. Air dryer is recommended for elimination of drain and water.

Rotary Table

Order made parts [g] Size 10 20 30 50 With interchangeable table and interchangeable plate 70 160 120 220 With interchangeable table 30 60 80 130 With interchangeable plate 40 100 40 90 Effective torque 10 50 8 Torque (Nm) 6 30 4 20 2 10 0 0.2 0.4 0.6 0.8 1 Oprating pressure (MPa) -22- Internal construction and parts MSQ10 to 50* 16 10 5 9 15 20 3 23 19 18 6 14 8 7 2 21 1 24 13 22 12 11 17

Oil Filter FH150 Series

Port size Applicable hydraulic fluid Material Spring (Nominal size) (Nominal size) NBR -70 -1 Petroleum, Water-glycol, Emulsion KA00052 KA00471 02 to 04 (C65) (P30) KA01174 KA00104 FKM -70 02 to 04 Phosphoric ester (C65) (P30) Note) The material and nominal size notations are based on JISB2401. 522 C Oil Filter FH150 Series Flow Rate Characteristics Differential Pressure Indication Handling

AMR3000 to 6000

70 103 121 131 161 51 61 66 81 28 37 37 44 32 40 48 56 3.2 3.2 4.5 4.5 37 37 42 42 21.5 18 16 18.5 182 215 281 325 144 166 188 230 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter assembly installation procedure Accessory/Compact pressure switch: IS1000-01 (Refer to page 3.10-1 for further information.) qInstall the O ring in the O ring groove of the adapter. wOrient the

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

x M5 x 0.8 thread depth 10 P.C.D.43 (Mounting thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70

Information

13.5 M12 x 30L 75, 100 101.5 10 to 50 110 120 CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.

3 Port Air Operated Valve

N.O. 20.5 NC 12 41.1 3R 1P 91 83 33 60 83 61.3 91 41.1 12 NO 3/8 1(P), 3(R) port 1/8 (Pitch) P = 33 12(PA) port 31 M5 x 0.8 (Breathing hole) L1 L2 7.5 (Station n) (Station 1) 1/8 12(PA) port 12 93.5 70 13.5 47.5 2A 2A 3/8 2(A) port (Pitch) P = 33 31 2 stations 95 80 128 113 161 146 194 179 227 212 260 245 293 278 326 311 359 344 392 377 425 410 458 443 491 476 524 509 557 542 590 575 623

Foot Pedal Type

MODEL VM2 SMC 54 71 177 152 Lock lever LOCK UNLOCK T.T. 2.5 (70) 30 18.5 11 B A XT34-60/67 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) Rc1/8 (Port 1) 14-E624 0.2 32 A 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 XT34-60/67 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) 3 x 6.5 mounting hole 53 XT34-67 (Without lock) 159 3 x 6.5 mounting hole MODEL VM2 SMC 54 71 177 152 T.T. 2.5 (70) 30 18.5

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

SJ3A6

Vacuum Release Valve with Restrictor Series SJ3A6 Plug-in Type Connector Connection D-sub Connector Flat Ribbon Cable PC Wiring Serial Wiring: EX180 Serial Wiring: EX510 P.70 Non-plug-in Type Individual Wiring Individual Wiring P.74 67 Vacuum Release Valve with Restrictor Common Specifications Series SJ3A6 Manifold Valve Specifications Valve construction Fluid 3 position 3 port valve with

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

IDUS/IDFS

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 70, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

: Both ends tapped, Port thread type: Metric, Body Options: -, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Rod End Bracket: -, Custom-made Specifications: Cold-resistant cylinder (-40 to 70°C), Type: Pneumatic type, Mounting bolt: -