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of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 5 - LEC-T1 Series/ / 3) *3) 1 1 1.5 1 () 6 - TB Ver.

HRX-OM-M005 Table of Contents Table of Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using this Product . 1-1 1.2 Hazards. 1-2 1.2.1 Hazard Levels . 1-2 1.2.2 Definitions of Serious injury and Minor injury . 1-2 1.2.3 Symbols . 1-3 1.3 Hazard Warning Label . 1-4 1.3.1 Type of hazard warning label . 1-4 1.3.2 Location of hazard warning label . 1-5 1.4 Location of Model Label . 1-

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

Cable color Tarminal no. 1 1.5m U 1 Red 1 V 2 White 2 3 3m W 3 Black 3 5 5m Shield signal Tarminal no.

/N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

(P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.

I0 O15..O0 0 AI0 AO0 Station I15..I0 O15..O0 0 AO0 System + unit diagnosis AO2 1 1 AI1 AO1 1 1 AO1 1st division 2 AI2 AO2 2 3 AI3 AO3 3 AI0 AO3 Station I31..I16 O31..O16 0 AI4 AO4 Station I31..I16 O31..O16 0 AI1 AO4 2 I47..I32 O47..O32 1 AI5 AO5 2 I47..I32 O47..O32 1 AI2 AO5 2 AI6 AO6 2 AI3 AO6 3 AI7 AO7 3 AI4 AO7 Station I63..I48 O63..O48 0 AI8 AO8 Station I63..I48 O63..O48 0 AI5 AO8 1 1

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.

System error Not applicable 1 1 1 Not applicable 1 -73No.PS-OMX1005 Error Error displayed Description Measures Error output Press the and buttons simultaneously for 1 second or longer to clear the error. Then check the wiring and model before copying again. Copy function is operated incorrectly. Copy error Not applicable 1 1: The switch output will be OFF when an error is generated.

Repeatability 1%F.S. 1 digit Hysteresis Hysteresis mode 0 to variable 1 Window comparator mode Output Voltage (rated pressure range) Voltage output 1 to 5 V 2.5%F.S. 2 Linearity 1.5%F.S. 1%F.S.

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum -101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

Effective area (mm2) Port size Weight (kg) Model Type of actuation 3.3 1 1 1 1 1 1 1 120 280 300 120 280 300 110 VP4150 1 4 1 2 Single 9.5 2 position 3 position VP4170 3.8 VP4250 1 4 1 2 Double 10 VP4270 4.4 VP4350 Closed center 4.4 Exhaust center 1 110 VP4450 3-6-2 3 Large Size 5 Port Solenoid Valve Rubber Seal Series VP450/470 How to Use DIN Terminal Precautions 1.

Linearity 1%F.S. Analogue output Output impedance approx. 1 k Output current (rated pressure range) 4 to 20 mA 2.5%F.S. 2.4 to 20 mA Current output 3 2.5%F.S. Linearity 1%F.S.

1 point: 0.5 A or less (2) 1 unit: 1 A or less (3) Total current of OUT0 to 7: 1 A or less Meet the three following conditions: (1) 1 point: 0.5 A or less (2) 1 unit: 3 A or less (3) Total current of OUT0 to 7: 1.5 A or less Max. load current Total current of OUT8 to 15: 1 A or less Total current of OUT8 to 15: 1.5 A or less Enclosure Short circuit installed Current consumption 50 mA or