Flow Range: 50~500 l/min, Thread: NPT Thread, Port Size: Port Size 1/2, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (4~20mA)
Thread Type: PT, OUT Port Size: 3/8, Valve Stations: 2 Stations
Thread Type: NPT, OUT Port Size: 3/8, Valve Stations: 2 Stations
Thread Type: NPT, OUT Port Size: 1/4, Valve Stations: 2 Stations
Thread Type: PF, OUT Port Size: 1/4, Valve Stations: 2 Stations
Thread Type: PT, OUT Port Size: 1/4, Valve Stations: 2 Stations
Thread Type: PF, OUT Port Size: 3/8, Valve Stations: 2 Stations
Flange Size: 80, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: 16, Flange Type: KF(NW), Port Direction: Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Size: 402, Thread: Rc(PT), Port Size: IN: 3/8; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: F [G(PF)], Port Size: IN: 1/4; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: F [G(PF)], Port Size: IN: 3/8; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: F [G(PF)], Port Size: IN: 1/2; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: NPT, Port Size: IN: 1/4; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: NPT, Port Size: IN: 3/8; Out: 3/8, Option: Metal Bowl
Body Size: -, Thread: -, Port Size: -, Option: -, Semi-Standard 1: -, Semi-Standard 2: -, Made to Order: -
Body Size: -, Thread: -, Port Size: -, Option: -, Semi-Standard 1: -, Semi-Standard 2: -, Made to Order: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -