PFxx-OMA1007

(Refer to page 40, 41) [EXA1-30] 10 to 1050 L/min [EXA1-30] 50 L/min Common Standby flow rate (Threshold) [EXA1-40] 20 to 2100 L/min [EXA1-40] 100 L/min Common [EXA1-60] 40 to 4200 L/min [EXA1-60] 200 L/min Common [EXA1-20] 0 to 520 L/min [EXA1-20] 50 L/min Common Sets the standby flow rate (hysteresis).

MGP

Spring washer (nominal size 3) 85 77 68 60 51 43 34 26 17 85 IN 201 181 161 141 121 101 80 60 40 201 OUT 40, 50, 63, 80, 100 8 16 BMG1-040 151 136 121 106 91 76 60 45 30 151 IN 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161

Guide Cylinder/Compact Type Series MGC

80 105 50 25 M6 x 1 M5 x 0.8 94 12 26 16 112 53 50 9 7 7 40 70 95 125 60 32 M5 x 0.8 104 12 31 20 132 63 60 M8 x 1.25 9 7 7 40 70 95 125 60 32 1/8 104 12 38 20 132 63 60 M8 x 1.25 11 8 7 45 82.5 115 150 75 38 1/8 115 12 47 25 162 73 70 M8 x 1.25 WH W X Y Z Bore size (mm) 20 25 32 40 30 23 30 146 182 30 25 37 167 199 25 28.5 37 167 202 20 33 44 210 227 Without Rear Plate Stroke range (mm)

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Nylon bow AF10 to 60 I\4elai bowlwth eve gauge AF30 lo 60 Thread type With bowl guard AF2O Nole 1) Drarn guide s NPT114 (appicable 10 AF30 to 60), and the exhaust poir ior aUo drarn comes wlh o3/8 One tolch tu1lng (appliEble lo AF30lo 60) , Whe. mor than one spec lrcal on is reqlired Drain guide l/4 AF3010 60 Fow direction Rrghi to efl AF1010 60 Nole 2) Drain guide is Grr4 (app cable 10

REA/REB

K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 300.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 0 320.039 100 38 66 72.2 26 122 69 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting Nuts: 2 pcs.

Stopper Cylinder

RSGBore size: 40, 50 (26 + Stroke) 16 (12) Workpiece transfer direction 2 16 (Rc 1/8, NPT 1/8, G 1/8) M45 x 1.5 9 Stroke 60 0 0.05 (Rc 1/8, NPT 1/8, G 1/8) 25 A 80 60 8 38 18 60 38 + Stroke 4 x 9 through 67 + Stroke 80 105 + 2 stroke Built-in One-touch fittings QB Tubing O.D.

125

Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

0.4

5 Port Solenoid Valve Connector Type Manifold Metal Seal / Rubber Seal IP67 enclosure compatible [Option] Power saving Power saving RoHS compliant Standard: 0.4 W Standard: 0.4 W (Reduced by 60% compared to existing model) (Reduced by 60% compared to existing model) High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W Series VQC1000/2000 CAT.ES11-101A Connector

Digital Flow Switches

Pin description 1 DC(+) PF2W740 2 OUT2 3 DC() 120 60 1.6 17 67 6 4 OUT1 FLOW SWITCH U P 34 55 S E T 60 50 34 OUT1 OUT2 DOWN FOR WATER 34 2-Port size 4-4.5 50 40 (42.2) 73 34 Flow direction 20 Series PF2W Dimensions: Integrated Display Type for Water PF2W711 148 77 80 79 32 9 2 U P FLOW SWITCH SET 70 58 88 46 45 OUT1 OUT2 DOWN 2-Port size 45 4-5.5 36 (42.2) 60 46 Flow direction 21 Digital

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Rated voltage 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry G H L LN LO M MN MO W0 Grommet (300 mm lead wire) Grommet (600 mm lead wire) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector Without connector cable Electrical

5 Port Solenoid Valve SY Series

wire Without connector 50 60 2 200 VAC Hz M M plug connector 50 60 110 VAC Hz [115 VAC Hz] MN MO M8 connector Without connector cable W0 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Note) For connector cable of M8 connector, refer to page 225.

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motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

REA/REB

REA63 0 86 32 53 300.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 0 320.039 100 38 66 72.2 26 122 69 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting Nuts: 2 pcs.

PFxx-OMU0002

(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 30 L/min) value is below 60 L/min) value is below 120 L/min) 60 to 3150 L/min 120 to 6300 L/min 240 to 12600 L/min 2.0 0 to 2%F.S.

2–4

65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x

MHL2

30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 60 10 40 MHC 60 MHT 16 40 MHY 60 MHW 20 40 MRHQ 60 25 Misc. 40 30 D32 20 2030 40 P . 12-4-7 20 Note) The open and close time spans represent the value when the exterior of the workpiece is being held.

IDU/IDF

Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point C 25 Series IDU/IDF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.