Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Size: 50, Standard Dew Point: H (-15°C), Type: A, Thread: F (G(PF)), Port Size: 03 (3/8)

Size: 20, Standard Dew Point: -20°C, Type: Standard, Thread: F (G(PF)), Port Size: 03 (3/8)

Size: 30, Standard Dew Point: L (-40°C), Type: A, Thread: F (G(PF)), Port Size: 03 (3/8)

Size: 75, Base Dew Point: S (-60°C), Type: A (Energy Saving Design), Equipment Connection: 4 (Modular Connection), Thread: F (G(PF)), Port Size: 03 (3/8)

Size: 30, Standard Dew Point: H (-15°C), Type: A, Thread: F (G(PF)), Port Size: 03 (3/8)

Flow Range: 20 (2~16 l/min), Thread: F (G thread), Port Size: 03 (3/8)

Size: 50, Base Dew Point: -20°C, Type: A (Energy Saving Design), Equipment Connection: 4 (Modular Connection), Thread: F (G(PF)), Port Size: 03 (3/8)

Size: 100, Standard Dew Point: S (-60°C), Type: A, Thread: F (G(PF)), Port Size: 03 (3/8)

Size: 20, Standard Dew Point: H (-15°C), Type: Standard, Thread: F (G(PF)), Port Size: 03 (3/8)

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Compressed Air Preparation Filter

D-G

PFxx-OMP0001CN

Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

PF3A7xxH_eng

PF3A702H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). 4 Snap shot function The current flow rate value can be stored to the switch output ON/OFF set point.

PF3A8xxH.eng

PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D 4 : For more information about the options, refer to our website (URL https://www.smcworld.com). Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]