Model: 10 (Side Ported), Number of Cores - Lead Wires: L2 (17 Cores), Lead Wire Length: 3 (3m), Valve Stations: 3 Stations, P, E Port Locations: D (D Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10T (Side Ported), Type: None, Valve Stations: 10 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L2 (17 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 5 Stations, P, E Port Locations: D (D Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

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! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

2-T1 L3 L2 L1 Model T1 T2 D L1 L2 L3 XTO-2571-02 Rc1/4 52 52 21 57 XTO-2571-03 Rc3/8 XTO-1239-02 Rc1/4 84 80 37 79 XTO-1239-03 Rc3/8 Rc1/4 XTO-1239-04 Rc1/2 XTO-1719-06 Rc3/4 98 98 40 90 XTO-1719-10 Rc1 !

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20 35 1.5 11.5 13-/22-MXQ12(L) 18.5 8.5 8.5 15.5 15.5 34.5 34.5 44.5 44.5 28.5 18.5 18.5 25.5 25.5 2.5 15.5 13-/22-MXQ16(L) 24.5 14.5 14.5 14.5 20.5 27.5 45.5

Stations: 4 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust)

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV2000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 20 stations available as standard, Optional DIN rail mount, 6 port sizes available, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV2000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 20 stations available as standard, Optional DIN rail mount, 6 port sizes available, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV2000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 20 stations available as standard, Optional DIN rail mount, 6 port sizes available, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV2000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 20 stations available as standard, DIN rail mount, 6 port sizes available, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD SV2000

Digital Gap Checker

S1, S2: Fixed orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle S1: Fixed orifice S2: Detection nozzle Measures against clogging Measures against clogging D C Number of orifices Orifice area ratio 3 1 68% increase1 By reducing the number of internal orifices from 3 A larger orifice area provides less possibility of to 1, there is less possibility of variations

Dedicated Controller

Model LC1-1-RH Controller/LC1 PC Cable length 022m 044m 033m 055m PC Controller Cable length: 2 to 5m Dedicated communication cable (D-sub) (For NEC PC-98 Series) PC-98 Series is a registered trade mark of NEC Corporation.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

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