Clean Gas Filter

pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1

EXxx-OMN0027CN

() 4 0 V() 5 FE (2)EX600-ED3PWR IN7/8 5 1 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V() 3 24 V() 3 24 V() 4 0 V() 4 0 V() 5 -29No.EX-OMN0027CN-D 2 SI IP67 -30No.EX-OMN0027CN-D EX600-ED2EX600

JXCx-OMU0004

OUT03 ON IN3 ON OFF [6] OUT03 ON IN0 bit_3 ON1 (2) RESET ON OFF [7] BUSY ON OUT03 STOP ON OFF OFF [8] BUSY ON IN0 OFF [9] BUSY OFFOUT 0 OUT0 ON OFF ON bit_0 [10] 2 1 OFF ON OUT1 bit_1 OUT2 ON OFF bit_2 OUT3 ON OFF bit_3 OFF ON BUSY OFF ON ALARM 0 46 No.JXC-OMU0004-A 9.2 .3435 53 97 No.3 NO.3 No.4 NO.4 No.4 (1) NO.4 (2) No.5 No.5 NO.5 NO.5 (3) (1) 3 4 9 7 (2) 4 3 5

Hand Valve Series VH 1

x 1.25 73 M8 x 1.25 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc 1/4 13.5 4-Rc 1/4, 3/8 VH32-02/03 (Bottom ported) 2 (A) 44 3 (R) 1 (P) 4-Rc 1/4, 3/8 4 (B) 5-8-10 5 Hand Valve Series VH Dimensions: Body Mounted VH40-02 to 04 VH40-06 ( ): Long handle type ( ): Long handle type 4 (B) 2 (A) 4 (B) 2 (A) 25 (32) 25 (32) 1 (P) 3 (R) 1 (P) 3 (R) SA 102 88 102 89 VA SA 4-6.6 VA 4-6.6 VM 81 88 Courtesy

Hand Valve Series VH

(R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH43l-02 to 04 (Bottom piping) VH43l-06 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

MY1

C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 GMY20 GMY16 GMY25 GMY32 MYB20-15-A7164 MYB16-15-A7163 RCS-8 RCS-10 P16 P12 TMY-25 TMY-32 5.1 x 3 x 1.05 4 x 1.8 x 1.1 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 7 x 4 x 1.5 7 x 4 x 1.5 C-6 C-7 MYMK-20-stroke Side seal assembly Polyurethane MYMK-16-stroke MYMK-40-stroke MYMK-25-stroke MYMK-32-stroke Note) Two types

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Qty. 1 1 2 2 2 2 4 2 !4 !

EXxx-OMS0026CN

07 Byte1 byte1 07 Byte2 byte2 815 SEN3(1) Byte3 byte3 1623 Byte4 2431 Byte5 Padding 4 byte 6 byte -59No.EX-OMS0026CN <2> 0 1 2 3 4 5 AXA DYB DYB DXB DXD SEN3 SI 4 byte 1 byte 2 byte 1 byte 1 byte 4 byte (0)(EX600-AXA)4 byte (3)(EX600-DYB)1 byte (4)(EX600-DYD): 2 byte (1)(EX600-DYB)1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0

EXxx-OMU0020CN

GSD EX245-SPN1 GSD STEP 7 HW ConfigOptionInstall GSD file . 4-2 Install GSD file BrowseEX245-SPN1 GSD . 4-3 GSD 23 No.EX-OMU0020CN 4.3.2. Device Name HW ConfigPLCEthernetEdit Ethernet Node . 4-4 Edit Ethernet Node EX245-SPN1 MAC BrowseDevice name . 4-5 Device name LLDP SI Device name 24 No.EX-OMU0020CN 4.3.3.

HRX-OM-W069

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

AIR COMBINATION

Model AC10*-A AC20*-B AC25*-B AC30*-B AC40*-B AC40*-06-B AC50*-B AC55*-B AC60*-B Port size M50.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Gauge port size Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5

VM

4 !5 !6 !7 !8 !

Hand Valve Series VH

/4, 3/8, 1/2 4-Rc 3/4 VH43-02 to 04 (Bottom ported) VH43-06 (Bottom ported) 2 (A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 Hand Valve Series VH Precautions Be sure to read before handling.

LEC-OM036xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

Mechanically Jointed Rodless Cylinder Series MY2

2%4$2$4$5 @4 #0 !

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

IDX-OM-W023

. i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP .

Environment

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

17.5 NPT 1/4 AS220-F02-ST G 1/4 AS220-02-ST Rc 1/4 17 18 R 1/4 72 19.5 7 27.2 40.2 17.5 1.5 36.7 AS320-N02-ST NPT 3/8 NPT 1/4 AS320-F02-ST G 3/8 AS320-02-ST Rc 3/8 19 22.5 R 1/4 123 24.3 9.5 30 54.8 21.9 1.5 49.3 AS320-N03-ST NPT 3/8 NPT 3/8 AS320-F03-ST G 3/8 AS320-03-ST Rc 3/8 19 22.5 R 3/8 128 24.3 9.5 30 52.6 19.7 1.5 47.4 AS420-N04-ST NPT 1/2 23.8 NPT 1/2 AS420-F04-ST G 1/2 AS420-04-