Electric Actuators

B5 OUT4 OUT4 B6 B6 OUT5 OUT5 B7 B7 BUSY BUSY Specific Product Precautions B8 B8 AREA AREA B9 B9 SETON SETON B10 B10 INP INP B11 B11 SVRE ESTOP ALARM SVRE ESTOP ALARM B12 B12 B13 B13 Input Signal Output Signal Name Details COM+ COM Name Details OUT0 to OUT5 BUSY AREA SETON Connects the power supply 24 V for input/output signal Connects the power supply 0 V for input/output signal Outputs

High performance type Step Motor Controller (Servo/24 VDC)

B2 OUT1 B3 OUT2 Caution B4 OUT3 B5 OUT4 When RESET is turned ON, these terminals are turned OFF. During the alarm, these terminals output the alarm group. B6 OUT5 B7 BUSY This terminal is ON during the movement of the electric actuator. (During the positioning operation, etc.).

LEC-T1_C

OUT mon 1 Output pin0 [ ] Output pin1 [ ] OFF Output pin2 [ ] ON (6-3-4-2) CN5 Output pin LECP,LECA LECPA Output pin0 Output pin0 B1 12 keykey Output pin1 B2 13 Output pin1 Output pin2 B3 14 Output pin3 B4 15 Output pin4 B5 16 Output pin5 B6 17 Output pin6 B7 18 Last output pin Output pin7 B8 19 Output pin8 B9 20 Output pin9 B10 Output pin10 B11 Output pin11 B12 Output pin12 B13 (6

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

tBottom porting NwsFR3-olTi4iffi]2-@@ Non plug-in VperNWsFR3-1G G6Eotull-@itel Bottom porting NW5FR3n O@ -*,ir;;.2 -@ (Ertornal pilot otBior porl: x12) inch (mm), n:stations 4 5 7 I 10 Equation L1=1.30xn+2.48 (Lr:33Xn+63) Lr:1.3o x n+2.95 (Lr:33xnt75) 5.08 (ia) 6.38 (162)(1951 8.98 t2n) 10.28 (261) 11.57 (n4) 12.87 tpl) 14.17 t360) 15.47 (3S3) L2 5.55 041) 6.86 (1741 8J5 (2071 9.45 (240)

Applicable Auto Switch Model

BBA3: For D-B5/B6/G5/K5 D-G5BAL is mounted on the cylinder with the above stainless steel screw BBA3 before shipment or BBA3 is enclosed with D-G5BAL when shipped without cylinder.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

B5 OUT4 B6 OUT5 B7 BUSY This terminal is ON during the movement of the electric actuator. (During the positioning operation, etc.). Caution During the pushing operation without movement (no movement but the electric actuator generating the pushing force), BUSY is OFF. BUSY signal stays on for 50ms or longer after operation starts.

Secondary Batteries

How to Order 90-ZPTSeries With buffer ZPT A8 U 06 K F 6 B5 90 Vacuum Equipment Mounting thread diameter/ Male thread Series compatible with secondary batteries A8 M8 x 1 90 Material restriction Vacuum entry port Pad diameter (mm) B5 M5 x 0.8 06 6 Buffer stroke Pad type 6 6 mm U Flat Buffer type K Non-rotating Material F Fluororubber *Specifications and dimensions for the 90-series are the

Electric Rotary Table

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Insulation color Connector pin no.

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) L5 B3 Nil PNP (+) or without SI unit/input block (SD0) NPN () N B4 Input block type (Fill out for I/O unit only) B6 B5 LM Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) 1 2 3 Ports 2, 4 size (inch) Ports 2, 4 Symbol N1 N3 N7 NM Ports 1, 3, 5 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting Mixed Top ported elbow 1

Air Pilot Operated Series NVSA

&i 17a '|.89 (,|8) 2.U (6n 3.54 (90) 1.73 (44) 1.81 (16) 3.54 (90) 1.97 (50) (20) 0.35 (9) 5.12 (13{t) 'r.33 (110) 1.38 (35) 0.67 n4 0.71 (1e) 1.34 (34) 1.18 (30) Mlllimters ln Parsnthses DIRECTIONAL AIR YALVE BASIC CONSTRUCTION NVSA 4924,4e34 NVSA 434 SOLENOID AND AIR PILOTS CAN BE INTERCHANGED Due to th modular design ot the Series NVS/NVSA 4024 lhrough 4044 valves, interchanging solenoids

-fl Seies

tBottom porting NwsFR3-olTi4iffi]2-@@ Non plug-in VperNWsFR3-1G G6Eotull-@itel Bottom porting NW5FR3n O@ -*,ir;;.2 -@ (Ertornal pilot otBior porl: x12) inch (mm), n:stations 4 5 7 I 10 Equation L1=1.30xn+2.48 (Lr:33Xn+63) Lr:1.3o x n+2.95 (Lr:33xnt75) 5.08 (ia) 6.38 (162)(1951 8.98 t2n) 10.28 (261) 11.57 (n4) 12.87 tpl) 14.17 t360) 15.47 (3S3) L2 5.55 041) 6.86 (1741 8J5 (2071 9.45 (240)

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

OMR0031

A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current Maximum Output current B7 NC

VQC

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow Wtih 3.2 One-touch fitting Top ported elbow With 4 One-touch fitting Top ported elbow With 6 One-touch fitting M5 thread Bottom ported elbow With 3.2 One-touch fitting Bottom ported elbow With 4

OMR0032

A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current 10 mA Maximum Output current

LA-OMP0023

Terminal Insulator Insulator number colour Dot Dot colour colour A1 Red Light brown Red A2 Grey Black A3 Grey Yellow Red A4 Grey Black Cable length(L) I/O cable type A5 Green Light green Red A6 Grey Black 1 1m 2 Without shield A7 Grey Gray Red A8 Grey Black 3 3m 5 With shield A9 Grey White Red A10 Green Black 5 5m B1 Red Light brown Red B2 Grey Black B3 Grey Yellow Red B4 Grey Black B5

Air Pilot Operated

&i 17a '|.89 (,|8) 2.U (6n 3.54 (90) 1.73 (44) 1.81 (16) 3.54 (90) 1.97 (50) (20) 0.35 (9) 5.12 (13{t) 'r.33 (110) 1.38 (35) 0.67 n4 0.71 (1e) 1.34 (34) 1.18 (30) Mlllimters ln Parsnthses DIRECTIONAL AIR YALVE BASIC CONSTRUCTION NVSA 4924,4e34 NVSA 434 SOLENOID AND AIR PILOTS CAN BE INTERCHANGED Due to th modular design ot the Series NVS/NVSA 4024 lhrough 4044 valves, interchanging solenoids

A

type D-B6 type D-B54L 24VDC 5 ~ 50 Relay, Sequence Controller Grommet D-B5 type D-B6 type D-B54L 100VAC 5 ~ 25 Relay, Sequence Controller Grommet D-B5 type D-B6 type D-B54L 200VAC 5 ~ 12.5 Relay, Sequence Controller Grommet D-B5 type D-B6 type D-B53L 24VDC 5 ~ 50 None Sequence Controller Grommet D-B5 type D-B6 type D-B64L 24VAC/DC or less 50 None Relay, Sequence Controller Grommet

CJ2X/CUX/CQSX/CQ2X/CM2X

Auto switch model Bore size (mm) 20 32 40 25 ML2B BM2-032 BM2-040 BM2-020 BM2-025 D-C7/C8, D-H7 D-B5/B6, D-G5 D-A3A/A44A, D-G39A/K39A Caution BA2-032 BA2-040 BA2-020 BA2-025 C J G5-S BM3-032 BM3-040 1. Be careful of the snap ring to pop out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it.

CJ2X/CUX/CQSX/CQ2X/CM2X

Auto switch model Bore size (mm) 20 32 40 25 ML2B BM2-032 BM2-040 BM2-020 BM2-025 D-C7/C8, D-H7 D-B5/B6, D-G5 D-A3A/A44A, D-G39A/K39A Caution BA2-032 BA2-040 BA2-020 BA2-025 C J G5-S BM3-032 BM3-040 1. Be careful of the snap ring to pop out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it.