SMC Corporation of America
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Bracket mounting Mount the bracket using the mounting screws (M3 x 15 L) suppllied. The required tightening torque is 0.320.02 Nm. L-type bracket (Through hole) Mounting screw (M3 x 15 L) Mounting screw (M3 x 5 L) CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

. -20No.PF-OMO0010-C Specification Specifications Specifications of body Model PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Applicable fluid Air and N2 Fluid temperature 0 to 50 C (no condensation or freezing) Flow Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L/min Pressure Rated pressure range -50 kPa to 0.5 MPa -50 kPa to 0.75 MPa Proof pressure 1.0

mode [d_1] Display instantaneous flow Common Unit selection function [U_1] L/min Indicator LED Indicates the reference condition selected.

g0h l)i dQ Shaft 8 for mounting (Should be prepared by user) Mounting hole 8 Attached thread M5x0.8 IZS30-D1 Power supply cable (IZS30-CP) Sensor cable (IZS30-CS)

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 B 15m (3

B3 4 15 16 (11) 30.7 L 15.4 ()[820m] 1 2 LE CP B 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 4 + B-1 4 A-1 5 + B-3 1 A-3 2 60 - 1 2 5.5 A1 (1) B1 (14) (18) 6.3 17.7 10.2 5 6 (2) (14.2) A6 B6 (3) 1 2 A1 B1 A3 B3 5.7 (4) 15 16 L 30.7 (11) 61 - 15.5 LEC

Start flag 0: no send Numerical data input 2 1: send 1 Step data No 0 to 63 Data writting 3 Operation Note) 1 1: Absolute 2: Relative 4 H 5 L Speed 2 0 to 65500 mm/s 6 3 7 2 Position 4 +/-2147483647 0.01mm 8 1 9 0 ID1 Numerical 10 H 11 L Acceleration 2 0 to 65500 mm/s2 data input 12 H 13 L Deceleration 2 0 to 65500 mm/s2 Data writting 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

Start flag 0: no send Numerical data input 16 1: send 1 Step data No 0 to 63 Data writting 17 Operation Note) 1 1: Absolute 2: Relative 18 H 19 L Speed 2 0 to 65500 mm/s 20 3 21 2 Position 4 +/-2147483647 0.01mm 22 1 23 0 24 H ID1 Numerical 25 L Acceleration 2 0 to 65500 mm/s2 data input 26 H 27 L Deceleration 2 0 to 65500 mm/s2 Data writting 28 Pushing force 1 0 to 30 10% 29 Threshold 1

bit 0,1 3 RESET bit 0,1 15 4 SETUP bit 0,1 5 bit 0 6 bit 0 7 bit 0 LECP6 LECA6 37 - Bit/Byte / Q_Address ID No. 0 1 16 1 063 1ABS 17 1 2INC() 18 H 2 065500 mm/s 19 L 20 3 21 2 4 2147483647 0.01mm 22 1 23 0 ID1 24 H 2 065500 mm/s2 25 L 26 H 2 065500 mm/s2 27 L 28 1 030 10% 29 1 030 10% 30 1 0255 mm/s 31 1 030 10% 32 H 2 065500 0.01mm 33 L ID2 3453 ID1 ID3 5473 ID1 ID4 7493 ID1

L 0.5m 1 1m 2 Branch connector LEC-CGD The junction cable to connect the gateway and the controller. 3 Cable between branches LEC-CG2Cable to connect the branch connector.

min(ANR) Outlet air flow rate L/min(ANR) Standard Performance conditions Purge air flow rate L/min(ANR) Inlet air pressure MPa *Note 3 0.7 25 25 Inlet air temperature oC Inlet air saturation temperature oC 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} 25 Ambient temperature oC Dew point indicator purge air flow rate Regulator construction (about Type V) Relief type Port size 3/

ZQ-OM00801-D Circuit Diagram Specifications of a Single Unit Ejector System L a L a L a t t t c h c h c h i i i L a L a L a n g n g n g 32 t t t t t t c c c y y y h h h Doc. no. ZQ-OM00801-D Pump system 33 - Doc. no. ZQ-OM00801-D Manifold Specifications Ejector System ZZQ1-BSB ZZQ1-BSC Pump system ZZQ1-OB ZZQ1-OC 34 - Doc. no. ZQ-OM00801-D Mass Ejector System Pump system 35 - Doc. no.

L L L L Fig. 7 MY1B series MY1BZ series MY1M/MY1MW series MY1C/MY1CW series MY1H/MY1HZ series MY1HT series Fig. 8 -10- When using the product that has a stroke that exceeds the stroke fine adjustment range, use an intermediate fixing spacer. Refer to the table below for the stroke fine adjustment range and the stroke adjustment range when using the intermediate fixing spacer.

Bore size(mm) Cylinder stroke(mm) 180 1569 200 998 250 813 320 495 How to order CS2 L 160 300 JR Mounting B Basic Additional symbol to cylinder L Foot J Nylon tarpaulin Boot F Rod side flange K Heat resistant tarpaulin G Head side flange Nil Cushion With cushion on both sides.

(Recommended flatness: 0.1 or less) M M M L L L L Fig. 6 Fig. 7 When using the product that has a stroke that exceeds the stroke fine adjustment range, use an intermediate fixing spacer. Refer to the table below for the stroke fine adjustment range and the stroke adjustment range when using the intermediate fixing spacer.

Basic style Rod seal Piston seal NBR CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS 12 16 20 25 CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS Tube gasket Long stroke CQSB12-L-PS CQSB16-L-PS 12 16 20 25 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS Set of left nos. !5, !6, !7. CQSB25-L-PS CQSB20-L-PS Seal kit includes !5, !6, !7. Order the seal kit, based on each bore size.

Lead wire length (m) Load voltage Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Style 0.5 (Nil) 3 (L) Applicable load AC DC 12V Horizontal 100V 24V Reed switch 2-wire Relay, PLC Grommet Yes A93 12V 3-wire (NPN) M9N 24V Solid state switch Relay, PLC Grommet Yes 12V 2-wire M9B Lead wire symbol 0.5mNil (Example) A93