8

16-13-3 Maximum operating pressure Minimum displayable pressure unit (digit) Minimum setting unit (digit) T 16-13-4 Temperature characteristics The amount of leakage TSJ 16-13-5 E N Ejector 16-13-3 U Noise resistance Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

VXD

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

® ITVH2000 Series 3.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator

output 4 Analog output 4 to 20 mA DC (Sink type) IC L ITVH ITVH ITVX N Without cable connector Pipe thread type PVQ Bracket* Nil Rc N NPT F G Note) VY1 Nil Without bracket Flat bracket VBA VBAT Note) Complies with ISO1179-1 (2007).

Series ITVX2000 5.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator

Set pressure range 3 0.01 to 3.0 MPa Cable connector type Straight type 3 m Power supply voltage 0 24 VDC S Input signal Current type 4 to 20 mA DC (Sink type) 0 Right angle type 3 m Current type 0 to 20 mA DC (Sink type) 1 2 3 L Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Monitor output N Without cable connector 1 2 3 4 Analog output 1 to 5 VDC Switch output/NPN output Switch output

P

When the IO-Link master is mounted on the PLC to use IO-Link IO-Link communication PLC Products IO-Link Master [IO-Link Master List] Manufacturer PLC Series Siemens ET200SP How to Order ITV 2 0 1 0 IO 2 S X395 Model Cable connector type S Straight type 3 m L Right angle type 3 m N Without cable connector 1 1000 type 2 2000 type 3 3000 type Bracket Pressure range 1 0.1 MPa 3 0.5 MPa 5 0.9

IDX-OM-U022

[IDFA150F] R R GFCI PE TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 FM3 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1 4 P X4 5 () PRR COM1 X0 6 THR X1 THS3 THS2 THS1 X2 L N CM PRS2 PRS3 X3 EDV OLR PE P P MC1,2 24V THR THS1,2,3 V V TB1,2 T FM1,2,3 SWL PRR PRS1 PRS2 PRS3 PLC GFCI EDV IDFA100F150F 6 7 6.4 IDX-OM-U022 6. 6.5 ,, IDFA100F150F 6 8 6.5 IDX-OM-U022 6. 6.6

Precision Cylinder Series MTS

Load voltage Electrical entry direction Lead wire length (m) Applicable load In-line 0.5 (Nil) 3 (L) DC AC Auto switch model Special functions Electrical entry Indicator light Wiring (output) Type 5 (Z) Perpendicular 24V A90V A90 IC circuit 2 wire 5V 12V 100V or less No Relay, PLC Reed switch Grommet 12V A93V A93 100V 3 wire (NPN equiv.)

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ2-Z Series 10, 16 Air Cylinder 10-/1121-/22RoHS How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Rubber bumper (Standard) Air cushion Nil A 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location 2 pcs. 1 pc. n pcs.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ2-Z Series Air Cylinder/10, 16 10-/1121-/22How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Rubber bumper (Standard) Air cushion Nil A 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location 2 pcs. 1 pc. n pcs.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 1 to 10 l/min 10 4 With neon light (220 VAC, Green) 10 to 20 l/min Simple flow setting Without removing the cover, you can set with a screwdriver from the

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: None, Calibration

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Solid State Vacuum Regulator Series ITV2090/2091

Straight type 3m Right angle type 3m Without cable connector 0 1 24VDC 12 to15VDC N Order made Input signal Bracket 0 1 2 3 4 Current type 4 to 20mADC Current type 0 to 20mADC Voltage type 0 to 5VDC Voltage type 0 to 10VDC Preset input Without bracket Flat bracket L-bracket Nil B Monitor output Thread type Port size 2 0 1/4 C Without (in case of preset input) Analog output 1 to 5VDC Switch

Clamp Cylinder with Magnetic Field Resistant Auto Switch (Rod Mounting Type) ø 40, ø 50, ø 63 CKG1/CKP1 Series

) Grommet 3 m 2-wire Solid state auto switch CKG1 24 VDC 5 m 2-color indicator 2-wire (34) Relay, PLC Pre-wired connector 0.3 m 2-wire (14) 3 m Grommet 2-wire 5 m Pre-wired connector 24 VDC 2-wire (14) 0.3 m 2-color indicator Reed auto switch DC/AC magnetic field CKP1 3 m 24 VDC 100 VAC Grommet 2-wire 1-color indicator 5 m DNote 1) Refer to page 433 when ordering the auto switch mounting

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: F (G), Port Size: 03 (3/8), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket:

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 06 (3/4), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 10 (1), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None,