Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: H7A2,

Regulator Unit Combination: Air Filter + Regulator + Lubricator, Port Size: Rc1, Filter Rating: 5μm, Operating Environment: Air powered tools, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock:

Regulator Unit Combination: Air Filter + Regulator + Lubricator, Port Size: Rc1, Filter Rating: 5μm, Operating Environment: Air powered tools, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Reverse Flow (Right to Left)] Right to left, Drain Cock:

Regulator Unit Combination: Air Filter + Regulator + Lubricator, Port Size: Rc1, Filter Rating: 5μm, Operating Environment: Air powered tools, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock:

Regulator Unit Combination: Filter Regulator + Lubricator, Port Size: Rc1, Filter Rating: 5μm, Operating Environment: Air powered tools, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal Case with Level Gauge, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: H7A2,

ARJ1020F

Manifold Base (Option)/Dimensions VBA VE VY G AL Stations Manifold base part No. 4 6 10 A dimension B dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 1.5-4

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

LOCK FREE LOCK FREE U D B M U side (2 to 10 stations) D side (2 to 10 stations) Power supply terminal Both sides (2 to 20 stations) Special specifications Specifications Symbol For special specifications, indicate separately with the manifold specification sheet. Note) A total of up to 3 SUP/EXH blocks can be mounted. Please contact SMC if 4 or more will be mounted.

KS/KX

Specifications Fluid Air 1.0 MPa 100 kPa 3.0 MPa 5 to 60C (No freezing) JIS B 0203 (Taper thread for piping), JIS B 0209, class 2 (Metric coarse thread) Maximum operating pressure Operating vacuum pressure Proof pressure Ambient and fluid temperature Thread Rotating Torque/Allowable Number of Rotations Applicable tubing O.D. 8 0.014 6.7 20 4 0.006 8.4 25 6 0.012 8.4 20 10 0.020 5 16.7 12

INFORMATION Step Motor Controller 5 types of communication protocols New New

1 (Edition 3.14) Volume 3 (Edition 1.13) Version 1.1 Port Class A Communication speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output

P

Flat head screwdriver Construction AW30/40-B-X2709 AW60-B-X2709 o q r w i !0 q t w o OUT IN t u e y OUT IN y e r No.

VQZ100V-OMT0001

No.VQZ100V-OM0001 VQZ V100 / / / / -2,3 -4,5 -4,5 -6 -6 -6 -6 -7 -7 -7 -814 -15,16 -1No.VQZ100V-OMT0001 *1) ISO 4414: Pneumatic fluid power ISO 4413: Hydraulic fluid power IEC 60204-1: Safety of machinery ISO 10218-1992: Manipulating industrial robots JIS B 8370: JIS B 8361: JIS B 9960-1: JIS B 8433-1993: *2) (ISO/IEC)(JIS) (JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

Process Pump

Handling Precautions. 10 5. Names and functions of parts.11 6. How to use.11 7. Specification and how to order. 13 8. Discharge capability . 15 9. Troubleshooting. 17 10. Outer dimensions . 19 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

XMA/XYA Series

l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMA KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main

AFF

(Element life check) Max. contact capacity: 10 VA AC, 10 W DC Rated contact voltage (max. operating current): 125 V AC (0.08 A), 30 V DC (0.33 A) Max. contact capacity: 10 W DC Rated contact voltage (max. operating current): 30 V DC (0.33 A) Pressure drop 0.1 MPa Symbol V: Degreasing wash, white vaseline Reed switch Reed switch Body/housing is degreasing washed.

VCHN

D Width across flats PAT. 7 A Freeze reduction type/Option VCHNF Sleeve guide Resin Sleeve Copper tubing -06 to 14 3 4 AN VCHN (mm) AMC Model Port size (R) A B C D Mass (g) VCHN3-06 VCHNF3-06 VCHN3-10 VCHNF3-10 VCHN4-10 VCHNF4-10 VCHN4-12 VCHNF4-12 VCHN4-14 VCHNF4-14 3/4 200 72 74 41 590 AMV 3/4 200 72 74 41 710 1 200 72 74 41 605 AMP 1 200 72 74 41 725 1 230 72 74 41 665 1 230 72 74 41 810

Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS  2  1F-W2D Series

For Flow Control Equipment Precautions, refer to Handling Precautions for SMC Products and the Operation Manual on the SMC website, http://www.smcworld.com Tubing O.D. 6, 8, 10 6 8, 10 8 10, 12 10 12 C values: Sonic conductance dm3/(sbar) Free ow 0.6 1.1 1.2 1.6 2.2 4.2 4.4 Controlled ow 0.7 1.1 1.3 2.2 2.6 4.4 4.8 Free ow 0.2 0.3 0.3 0.2 0.2 0.3 0.3 b values: Critical pressure ratio Controlled

BP1000

: 1/4 inch NPT) -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa Material Code S, SH V V 0 No code MPA Ports B V3 1 2 10 -30 in.Hg to 30 psig 2P 4PL Please refer to the following porting configurations. 2) Pressure gauge unit MPa or psig/bar selectable.

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5