VXD21/22/23

80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Power Valve: Economy Valve Series VEX5

Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

Large Bore Compact Cylinder Series CQ2

(different sides, same side) 10 (0.4) 5 (0.2) 15 (0.6) 1 pc. 5 (0.2) 5 (0.2) 10 (0.4) Theoretical Output/Double Acting Type OUT IN Unit: N Operating Pressure MPa (psi) Bore size (mm) Operating direction 0.7 (101.5) 0.6 (87) 0.5 (72.5) 0.4 (58) 0.3 (43.5) 0.2 (29) IN 16933 14514 12095 9676 7257 4838 180 OUT 17812 15268 12724 10179 7634 5089 IN 21112 18096 15080 12064 9048 6032 200 OUT 21991

Mini Rotary Actuator

Note 19 - CRJU05~1 11 8 6 12 4 10 3 10 18 11 14 7 9 1 13 15 17 16 2 17 15 14 18 18 Hexagon socket head set screw 2 17 Wear ring 2 16 Magnet 2 15 Piston seal 2 14 O-ring 2 13 Hexagon nut 2 12 Round head no. 0 Philips screw 3 11 Hexagon socket head cap screw 4 10 Bearing 2 9 Hexagon socket head set screw 2 8 Stopper retainer 1 7 Holder 1 6 Stopper 1 5 Cover 2 4 Bearing retainer 1 3 Shaft

LEC-OM036xx

CN1: Controller IF communication connector (CONT)28 8. 1 Connection.28 8. 2 Wiring diagram.30 9. CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

2-Color Display

Settings can be copied to up to 10 slave sensors at once. (Max. transmission distance: 4 m) Unit 1 Unit 2 Unit 10 1) The sensors are connected by a dedicated lead wire (ZS-38-5L (for master and one slave) or ZS-38-U (for master and up to 10 slaves)).

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

MHS

=20mm 3263 =30mm 80 =50mm 0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3

Digital Pressure Switch

Output mode Display resolution Hysteresis mode 1/10 of P_1(n_1) Window comparator mode 1/4 of P1HP1L(n1Hn1L) Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric pressure Compound pressure: Rated maximum pressure 1/4 of the atmospheric pressure Error output Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric pressure Compound pressure

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram PCW-EC08Z00 PCW-EC08Z01 2 4 6 8 10 12 14 20 16 18 Power supply terminal block Input/output connector (CS0) 1 3 5 7 9 11 13 15 17 19 14 8 4 2 6 20 16 18 10 12 Input/output connector (CS1) 13 1 3 5 7 9 11 19 15 17 Green Red Connection 1 1 1 1 1 1 1 1 2 2 2 3 4 3 4 CN2 CN3 2 2 2 3 4 CN5 2 2 1 3 3 3 4 CN4 3 4 3 4 CN6 24VDC 4 CN1 4 2 *S2

ZP

ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8 ZL ZP13UT ZP13CT 13 13 14 14 1.5 1 ZP16UT ZP16CT 16 16 17 17 ZY ZQ Elliptic ZF ZP 2004 U N ZP Material Pad diameter ZCU N NBR 2 x 4 (Breadth x Length) 2004 S AMJ Silicon rubber 3507 U 3.5 x 7 Urethane rubber 4010 F 4 x 10 Misc.

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

ZSM1-115/121

x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556

FREE MOUNT CYLINDER

(mm) Operating direction 0. 3 0. 5 0. 7 1. 6 OUT 3 6 IN 21. 2 2. 86 7. 10 11. 3 3. 0 OUT 4 10 IN 66. 0 12. 9 26. 1 39. 3 5.9 OUT 6 16 IN 172 37.2 71. 8 106 5. 9 OUT 20 8 IN 264 58 111 164 11 OUT 25 10 IN 412 95 178 260 16 OUT 32 12 IN 691 173 312 420 Note) Prevent load from being applied to the piston rod when the piston rod is being extended. 6/10 2.

Low torque Metal seal type Rotary joint

MQRF2-M5) * flange: MQR12-F (for MQRF12 M5) * 45 * 37 0.03 4.5 * 4-3.5 mounting hole * 4-3.5 mounting hole 3 +0.1 0 depth 10 2-M3 x 0.5 thread length 6 P.C.D.29 44h8 (10 from end) 35h8 (10 from end) 20h8 8.2 x 3 = 24.6 P = 8.2 2 70 *5 (55) 13 15h8 4-M5 x 0.8 10 counter bore depth 1.5 50 2 8.2 26 1 2 (34) 1 2 3 4 2 1 8-5 x 0.8 10 counter bore depth 1.5 14 *5 27 6.5 3.5 6.5 3.5 15H8 (8) 20H8

Digital Flow Switch

flow range 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min Instantaneous flow 5 to 525 L/min 10 to 1050 L/min 20 to 2100 L/min Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 1 Every 2 minutes or every 5 minutes

CYP_EN

Applicable grease pack Grease pack Weight GR-X-005 5 g 10/11 10-1. Model Selection 1 11/11 10-2.

AN

(Ex.: AN200-N02) AN600-10 270 1 1 1 AN700-12 440 1 4 AN800-14 590 1 2 AN900-20 960 2 Note) NPT thread is also available. Specify N after ANm00-.

Uniaxial Electric Actuator Series LJ1

2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20 0 2