New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542 Compact and light Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2
In such a place, use of flame resistant fittings (KR/KRM series) and flame resistant tubing (TRS/TRB/TRBU/TRTU series) are recommended. Air Supply Warning (1) Type of fluids Please consult with SMC when using the product in applications other than compressed air.
. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1
A B C D E F H I G Model VHS20 VHS30 VHS40 VHS40-06 VHS50 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 28 30 36 44 54 45 55 63 69 81 33 42 44 50 61 How to Order 30 03 RZ F VHS Residual pressure relief 3 port valve Caution 1. Pleae consult with SMC when a pressure switch and T type spacer are installed on the outlet of pressure release valve. 2.
In such a place, use of flame resistant fittings (Series KR/KRM) and flame resistant tubing (Series TRS/TRB) are recommended. (7)Do not use in an environment where the product is directly exposed to cutting oil, lubricant, coolant oil, etc. Please contact SMC if using for an environment exposed to cutting oil, lubricant or coolant oil, etc. 6 - bRemoval of tubing 1.
(Applicable tube: FR soft nylon) Applicable fitting size Model Weight (g) D L KR-08C KR-06C 6 0.9 1.0 1.5 1.6 KR-10C KR-12C 15.5 9 17 9 20.8 10.5 22.8 10.5 8 10 12 When tube insert parts are in line as KQU Union Y, use KRC1.
Note 2) Standard lead wire length: 300 mm High pressure/External pilot type (Metal seal type only) KR Note 1, 2, 3) (0.9 W) Coil voltage 1 2 3 4 5 6 Note 1) Option Note 2) For details on external pilot type, refer to page 933. Note 3) There is no VQZ1000 setting.
In such a place, use of flame resistant fittings (Series KR/KRM) and flame resistant tubing (Series TRS/TRB) are recommended. (7)Do not use in an environment where the product is directly exposed to cutting oil, lubricant, coolant oil, etc. Please contact SMC if using for an environment exposed to cutting oil, lubricant or coolant oil, etc.
GB 5.13 ELECTRICAL LAYOUT Legend : IG : Main switch VC : Condenser fan K : Refrigerating compressor PR : DMC11 probe KR : Compressor start-up relay EVB : Hot gas by-pass solenoid valve KM : Compressor electric motor EVD : Condensate drain solenoid valve KT : Compressor thermal protection GB 6.1 CONTROLS AND MAINTENANCE The maintenance operations must be worked out by qualified personnel.
Silencer box (Bottom) 1 4 (Top) 1 4 (Both sides) 1 4 (Bottom) 3 8 (Top) 3 8 (Both sides) 3 8 One-touch fitting for 12 tube (Bottom) One-touch fitting for 12 tube (Top) (Right) 1 4 (Right) 3 8 (Left) 1 4 (Left) 3 8 (Bottom) 1 4 (Bottom) 3 8 1 1 Without Filter with auto-drain, regulator, air release valve Filter with auto-drain, regulator, pressure switch, air release valve 02D 02U 02B 03D 03U 03B
6 (left side) One-touch fitting 8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L 1 (P), 3 (R2), 5 (R1) port piping connection Rc1/4 (bottom) Rc1/4 (top) Rc1/4 (both sides) Rc3/8 (bottom) Rc3/8 (top) Rc3/8 (both sides) One-touch fitting 12 (bottom) One-touch fitting 12 (top) One-touch fitting 12 (both sides) Mixed 02D 02U 02B 03D 03U 03B
Description RLQ40 RLQ50 RLQ63 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C 2 Metal speed controller 5 2 Male elbow By-pass tubing Spatter cover 6 1 2 7 8 9-12-18 19 Series RLQ Compact Cylinder with Air Cushion and Lock Accessory Bracket Dimensions Single knuckle
Description RLQ40 RLQ50 RLQ63 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C Metal speed controller 5 2 Dimensions not shown are the same as standard type.
Example) -KR Note 2) Indicate the wiring specifications for mixed single and double wirings. Note 3) For details, refer to page 755. For manifold optional parts, refer to pages 755 to 757.
Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2
10 (Left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Thread type VZS Rc Nil 1(P), 3(R2), 5(R1) port connection NPTF T G F VFS Rc 1/4 (Bottom side) Rc 1/4 (Top side) Rc 1/4 (Both sides) Rc 3/8 (Bottom side) Rc 3/8 (Top side) Rc 3/8 (Both sides) One-touch fitting 12 (Bottom side) One-touch fitting 12 (Top side) One-touch fitting 12 (Both sides) Mixed 02D 02U 02B 03D 03U 03B
Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +
10 (Left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Thread type VZS Rc Nil 1(P), 3(R2), 5(R1) port connection NPTF T G F VFS Rc 1/4 (Bottom side) Rc 1/4 (Top side) Rc 1/4 (Both sides) Rc 3/8 (Bottom side) Rc 3/8 (Top side) Rc 3/8 (Both sides) One-touch fitting 12 (Bottom side) One-touch fitting 12 (Top side) One-touch fitting 12 (Both sides) Mixed 02D 02U 02B 03D 03U 03B
IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 F J E B-series dH10 +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 +0.1 0 50 40 M8 x 1.25 185 145 57
Applicable air preparation equipment VHS4O vHs40-06 Nole) Although connection to to the mounting position; Pressure o a a a a a a a a r a a a a a a a a o a a a a a a a a a a a a a a a a a a o a a a a o a a a a o a a a a a a a a a o a a a a a VHS -TPressure relief I 3-port valve Notel) Only lor lhe NPTlhread Size combination Port thread Large knob utilizes an oversized knob for simDle oDeration