High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 4 0.5 0.5 4 3 16 16 2 2 40 40 5 5 2 1 Pin no. Pin description 1 DC(+) 2 NC/Analog output 3 DC() 4 OUT 31

LEYx-OMZ0015

2-2 32 LEYG-S032 32 LE-D-2-4 -16- 4.

Air-hydro Unit

28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and

IZT40/41/42

Bar + High-voltage power supply module + Controller IZT 40 X14 34 D 1 6H R F IZT X14 42 34 D 1 6H R F Bar IZTB X14 40 34 D 1 6H R F Standard model no. e pages 17 and 18 Bar length Type 40 411 Standard Symbol 16 22 34 40 46 58 64 82 112 130 160 190 232 250 Length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 42 Non-standard The bar of non-standard length is available.

T

(mm) 12 3.2 4 6 8 10 D Tubing I.D.

Coolant Valve

Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40

Plug-in/Plug Lead: Single Unit

Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

Short Stroke Electric Actuator Series LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

air-filter-e

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Air Preparation Equipment

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Fieldbus system (SI unit compatible CompoNet TM )

Dimensions (unit: mm) EX120-SCM# -32No.EX-OMM0008-D EX121-SCM# -33No.EX-OMM0008-D EX122-SCM# -34No.EX-OMM0008-D Revision history A: Add the contents.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

Solid State Auto Switch

-C D-T791C D-T792C -21No.D-S-OMB0023-C D-S991/D-S9P1/D-T991 D-S992/D-S9P2/D-T992 -22No.D-S-OMB0023-C D-S99V1/D-S9PV1/D-T99V1 D-S99V2/D-S9PV2/D-T99V2 -23No.D-S-OMB0023-C Pre-wired connector D-#APC/D-#BPC D-#DPC -24No.D-S-OMB0023-C Revision history A: Limited warranty and Disclaimer are added.

Electric Actuator / Low profile slider type

50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PV D-M9P DC24V DC12V Relay PLC 2-wire D-M9BV D-M9B DC24V DC5V,12V 3-wire (NPN) D-M9NWV D-M9NW DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PWV D-M9PW Yes Grommet DC24V DC12V Relay PLC 2-wire D-M9BWV D-M9BW DC24V DC5V,12V 3-wire (NPN) D-M9NAV D-M9NA DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PAV D-M9PA DC24V DC12V Relay PLC

JXCx-OMT0062

*1) Procedures for resuming operation when alarm group D is generated 1.

Step Motor Controller (Servo / 24 VDC)

Setting Data Entry . 35 7.1 Step data . 35 7.2 Basic parameter . 38 7.3 Return to origin parameter . 40 8.