In-line Air Filter

(ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7 MPa 10 10 0 0 200 400 600 0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch

Unit Manifold Valve

In case of 4 stations 1(P) 3(R) 2(A) 2(A) No.4 No.3 2(A) 2(A) Solenoid Specifications No.2 No.1 Coil rated voltage 12, 24 VDC In case of 8 stations 12 VDC 24 VDC Allowable voltage fluctuation Note) 1(P) 3(R) Standard 4% to +10% 7% to +10% Power-saving type 6% to +10% 5% to +10% 2(A) 2(A) Standard: 0.55 Power consumption (W) No.8 No.7 With power-saving circuit (Continuous duty type): 0.23

Digital Flow Switch

210 L/min (Displays [ 0] when the value is between -1 and 1.)

Heavy Duty Stopper Cylinder

/4 G1/4 40 10 54 31 3 6.7 19 109 49 6 20.6 12.5 23 Rc1/4 NPT1/4 G1/4 Note 1) Dimensions when equipped with auto switch are the same as drawing above.

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 15 100 105 110 D-A9 15 + 40 (n2) 2 (n = 4, 8, 12, 16) 100 + 40 (n4) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 10 75 80 85 D-A9V 10 + 30 (n2) 2 75 + 30 (n4) 2 80 + 30 (n4) 2 85 + 30 (n4) 2 n pcs.

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

76

) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) Atmospheric pressure dew point F (C) How to read the dew point conversion chart Example) To obtain the atmospheric pressure dew point at a pressure dew point 50F (10C) and a pressure 102 psi (0.7 MPa). 1.

IDX-OM-W093

1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2

Flow Sensor Series PFMV

[l/min] 954 Flow Sensor Series PFMV5 Dimensions PFMV5-1 PFMV5F-1 0.8 34.4 10 2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through

Digital Flow Switch

range 5 to 500 L/mim 10 to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated

IR1000/2000/3000

VE Ozone resistant VY1 IRM 10 3 G 4 For High/Low Temperature Environments Set pressure and quantity Stations G 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs. 2 2 stations Standard model no.

IDX-OM-W019

the GFCI . 9 1 Chapter 10 Specification for Option S 10 1 Safety instructions. 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions. 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 2 11 4 How to connect the power supply and signal cable . 11 2 11 5 Electric wining diagram . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions

PROFIBUS DP Compatible Fieldbus System

1.

S Couplers

KK130P-06H -08H -10H -12H -07H -09H -11H -13H KK130S-06H -08H -10H -12H -07H -09H -11H -13H 6 6 Metric size mm Inch size Metric size mm Inch size 8 8 10 10 12 12 1/4" 1/4" 5/16" 5/16" 3/8" 3/8" 1/2" 1/2" Refer to the how to order on page 1 for the sleeve lock mechanism provided type.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

EXxx-OMK0006

Baud rate Table Baud rate SW1 SW2 SW3 SW4 1000 0 0 0 0 800 1 0 0 0 500 0 1 0 0 250 1 1 0 0 125 0 0 1 0 1 0 1 0 50 0 1 1 0 20 1 1 1 0 10 0 0 0 1 : CAN LED illuminates RED when an invalid combination is set with DIP switches SW1 to 4.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

Filter for Cleaning Solvent Quick Change Filter Series FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25 20 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32

Series KC Self-seal Fittings

KBE1-04 KBE1-06 KBE2-06 KBE2-08 KBE2-10 KBE3-08 KBE3-10 KBE3-12 KBE4-12 16.0 17.9 27.0 26.0 29.5 57.5 51.6 63.0 83.4 66.6 34.5 35.5 37.5 39.0 41.5 43.5 45.0 46.0 44.0 M12 1 14 14 15.0 15.5 17.0 15.5 15.5 19.5 31.5 32.0 33.5 35.5 38.0 39.5 41.0 42.0 41.5 4 13.6 17 17.0 M14 1 6 17 17.6 18.5 21.0 18.5 21.0 M16 1 M20 1 M16 1 M20 1 19 24 19 24 8 10 8 10 22 25.2 18.5 22.0 12 M22 1 27 24 18.0 27.0