Series AP3100 Specifications AP3100 AP3102 AP3150 AP3157 AP3125 Select compatible materials of construction for the gas Operating Parameters Gas Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) Vacuum to 3000 psig (20.7 MPa) 1) Operating pressure Vacuum to 1300 psig (9.0 MPa) Proof pressure Burst pressure Ambient and operating temperature Cv 3) 4500 psig (31 MPa) 10 psig (69 MPa) -40 to
-31&" ; ~~T; 12 . .. . I AS~'Nl>?f3S ~ ~ fit ' .. I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .
When re assembling, tighten the cover through an extra 2--3+ from the 155,9 OUT 31 ,2 187,0 93,5 :,24.7 original assembled position. 20 63 140,2 IN 28,0 84,1 112.1 168.2 .
, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42 42 50 60 K L 52 52 62 72 C 29 29 35 40 M 26 26 31
(Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31
VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Mounting bolt and gasket are not included. Thread type Nil N T F Rc NPT NPTF G 3 position exhaust center 3 position closed center Caution Be sure to read this before handling.
Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height
Specifications Specifications AFF2B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on pages 14-20-10, 16, 23, 31, 37 and 43. Refer to How to Order for standard specifications on pages 14-20-3, 10 and 16.
.: GR-S-010 (10 g), GR-S-020 (20 g) 31
SI Unit: AS-i, 8 In/8 Out, 31 Slave, 1 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -
SI Unit: AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -, US Option: -
SI Unit: AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -
SI Unit: AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting Method: -, US Option: -
SI Unit: AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø6 One-touch Fitting, Mounting Method: -, US Option: -
Stations: 4 Stations, Port Size: 1/4" One-touch Fitting, SI Unit: AS-i 8 in/out - 31 Slave Modes - 1 Power Supply Systems, -COM, Number of Input Blocks: Input Block 2 pcs., Input Block: M12, 4 Inputs, Input Block COM: -, Option 1: -, Option 2: -, US Option: -
Stations: 4 Stations, Port Size: 1/4" One-touch Fitting, SI Unit: AS-i 8 in/out - 31 Slave Modes - 1 Power Supply Systems, -COM, Number of Input Blocks: Input Block 2 pcs., Input Block: M12, 4 Inputs, Input Block COM: N [NPN (-)], Option 1: None, Option 2: Built-in Silencer, Direct Exhaust, US Option: -
Stations: 4 Stations, Port Size: 1/4" One-touch Fitting, SI Unit: AS-i 8 in/out - 31 Slave Modes - 1 Power Supply Systems, -COM, Number of Input Blocks: w/o Input Block, Input Block: -, Input Block COM: -, Option 1: -, Option 2: -, US Option: -
Stations: 1 Station, Port Size: ø8 One-touch Fitting, SI Unit: AS-i 8 in/out - 31 Slave Modes - 2 Power Supply Systems, -COM, Number of Input Blocks: w/o Input Block, Input Block: -, Input Block COM: -, Option 1: -, Option 2: -, US Option: -
Stations: 2 Stations, Port Size: ø6 One-touch Fitting, SI Unit: AS-i 8 in/out - 31 Slave Modes - 2 Power Supply Systems, -COM, Number of Input Blocks: w/o Input Block, Input Block: -, Input Block COM: -, Option 1: -, Option 2: -, US Option: -
Stations: 3 Stations, Port Size: ø6 One-touch Fitting, SI Unit: AS-i 8 in/out - 31 Slave Modes - 2 Power Supply Systems, -COM, Number of Input Blocks: w/o Input Block, Input Block: w/o Input Block (SD0), Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: None, Option 2: Built-in Silencer, Direct Exhaust, US Option: -