Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32 32 37 37 39 55 166 187 187 218 218 241 241 277 334 AMH150 40 40 50 50 55 55 65 85 AMH250 AMH350 AMH450 AMH550 AMH650 4.6-19 Micro Mist Separator with Prefilter Series AMH Dimensions: AMH850 Accessory D: With auto drain (N.O.) for AMD850 Options T: With

A

42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111

Ozone Resistant

) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control

MGZ Series

(different sides) 25 Auto Switches/Proper Mounting Position for Stroke End Detection D-Z7, Z80 D-Y59, Y69, Y7P D-Y7NW, Y7PW, Y7BW D-Y7BAL A 0 to 1 A B Bore size (mm) B 40 0 23 50 0 23 63 0 32 1in = 25.4mm Auto Switch Mounting Flat head watchmakers screw driver When mounting an auto switch, first hold the switch spacer between your fingers and press it into the groove.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

8.5 24 60 0.5 18 3 21.5 2 20 4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 M4 x 0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

SY 32 SYJ A' VK Coding stud.

4/5 Port Air Operated Valve Series SYJA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 15 17 17 R1 P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For

VQ5000

Outstanding response times and long service life kit (Lead wire) F L (Metal seal with light/surge suppressor) kit (D-sub connector) VQ5100 32 mS (Single) Enclosure IP65 compliant Dust tight/Low jetproof type 100 million cycles According to SMC life test conditions VQ5200 17 mS (Double) Accuracy 3 mS Enclosure For applications which demand high speed, high frequency, long life

Size: 32, Motor Mounting Position: In-line (sizes 25, 32, 40, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: B (Size 25: 6; Size 32: 8; Size 40: 10), Stroke: 700mm, Motor Option: B (with Lock), Grease Application: with, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Escapements/Single Finger Type Series MIS

Escapements/Single Finger Type Series MIS 8, 12, 20, 25, 32 Replacement Procedure is P.390 Construction Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 8 e !0 !1 !2 25, 32 Option !

Input modules can be added or removed at the point of use.IP67 enclosure (IP40 for SI unit compatible with ControlNet), Maximum 32 inputs/32 outputs , Connection of sensor with M8/M12 connectors possible , Available communication protocols include: DeviceNet, PROFIBUS DP, CC-Link, AS-i, CANopen, ControlNet and EtherNet/IP , Applicable to valves: VQC1000/2000/4000, S0700 and SV1000/2000/3000

The VXA31/32 series manifold is individual ported.

PF2A/PF2W

If operated outside of the flow rate measurement range, the Karman vortex will not be generated and normal measurement will not be possible. 16-11-32 29 Series PF2A/PF2W Specific Product Precautions 2 Be sure to read before handling. Mounting Usage Warning Warning [For air] 9. Never mount a switch in a place that will be used as a scaffold during piping.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

VNH

2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

SYJA3000

A B M5 X 0.8 (pilot port) 10 24 A B 19 R P 2.6 23.5 237.5(mounting holes pitch) Bracket SlA (Mounting holes for manifold) (Mounting holes) 4 47 42 (Non-locking) Manual override VlA 30 24.5 37 23 20 3 11.5 3.5 4 11 2.6 2(Mounting holes) 18 (Piping port) 4-Rc(PT)1/8 19.5 46.5 25 SlA 1.8 (Bleed port) With filter (80 Mesh) 2.3 46.5 33.5 21.5 5-M5 X 0.8 (Piping port) VlA 8.5 6 6 15 17 17 24 32

Vacuum System Peripherals:

32 e Valve Model Fill in the blanks below with symbols of necessary specifications.

VQ

L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15