New

Fluid and Ambient Temperature Valve Leakage Rate Internal Leakage Fluid temperature (C) Ambient temperature (C) NBR (FKM) Note 2) Seal material Leakage rate (Water) Note 1) 0.1 cm3/min or less 20 to 60 1 to 60 External Leakage Note) With no freezing NBR (FKM) Note 2) Seal material Leakage rate (Water) Note 1) 0.1 cm3/min or less Note 1) Leakage is the value at ambient temperature 20C.

Air Slide Table Series MXS

60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 56 Air Slide Table Series MXS The graphs below show the table displacement when the static moment load is applied to the table.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RSG-K Bore size: 40, 50 (26 + Stroke) Workpiece transfer direction 16 (12) 2 16 (Rc 1/8, NPT 1/8, G 1/8) 9 M45 x 1.5 60 0 0.05 (Rc 1/8, NPT 1/8, G 1/8) Stroke 10 25 80 60 0.15 A 38 18 8 38 + Stroke 67 + Stroke 4 x 9 through 60 0.15 105 + 2 stroke 80 Built-in One-touch fittings Tubing O.D.

Guide Cylinder Series MGG

3 600st 2 400st 500st st: Stroke (mm) 100st 200st 300st 0 1 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Allowable end load F (N) 5 Guide Cylinder Series MGG MGGM 63Stroke 7.5 7 (Slide bearing type) 6 Deflection Y (mm) 5 1100st 1000st 4 900st 3 800st 700st 2 600st 400st 500st st: Stroke (mm) 1 100st 200st 300st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360

High Purity Chemical Valve

) Action Toggle type (non-locking/locking) Fluid temperature (C) 0 to 60 Ambient temperature (C) 0 to 60 Mass (kg) 0.06 0.14 0.26 Note) Contact SMC if the valve is to be used with B A flow.

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operation of the compressor which can cool down 9.5 kW at 60 Hz.

Cylinder with Lock

E2 TA TC TD TF TH TL TO TR TS TT TU TX TY TZ UW XV Z 32 MB-S03 47 62 62 12 +0.070 0 47 35 45 12 7 10 13 8.5 50 71 74 49 131 153 40 MB-S04 54 80 80 16 +0.070 0 60 45 60 17 9 12 17 10 63 77.5 97 58 150 174 50 66 80 92 16 +0.070 0 60 45 60 17 9 12 17 10 75 91 109 71 166 198 63 MB-S06 77 100 110 20 +0.084 0 80 60 70 20 11 14 22 15 90 103 130 87 179 211 80 99 100 130 20 +0.084 0 80 60 70 20 11

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AC Specification (Built-in Full-wave Rectifier Type) AC Specification (Built-in Full-wave Rectifier Type) Class B Class B Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Apparent power (VA) Temperature rise (C) Model Model VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 7 60 9 60 9.5 70 10 70 12 14 70 70 Class H Class H Apparent power (VA) Note 1) 2) Temperature

100

50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 X 60 70 ZZ 180 192 Model CY1B50 CY1B63 Mounting Nut/included (2 pcs.)

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

MXS

MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 60 20 40 80 100 120 Load (N) Load (N) Load (N) 8-4-10 11 Air Slide Table Series MXS Table Displacement due to Pitch Moment Load Table yaw deflection due to static yaw moment applied at arrow for fully extended stroke of slide table.

Vacuum Pad

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

Vacuum Pad

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

MXS

MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static

Booster Regulator/Air Tank

(P3 P2) x 9.9 V [L] = (Q Qb/2) x (Tc x K/60) Obtain the tank capacity V. (841 600/2) x (0.5 x 2/60) V = = 4.6 [L] (1.0 0.8) x 9.9 Applicable combination model Internal capacity Tank model VBAT05A(1) VBAT05S(1) VBAT10A(1) VBAT10S(1) VBAT20A(1) VBAT20S(1) VBAT38A(1) VBAT38S(1) 5L VBA10A/11A Select the tank capacity over V.

Vacuum Pad

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

Vacuum Pad

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

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Add 10 g for conduit type, 60 g for conduit terminal type respectively.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VFS Manifold Specifications VS SS5Y5-60 SY560 SS5Y3-60 SY360 Model SS5Y7-60 SY760 Applicable valve VS7 Manifold type Stacking DIN rail mounted type P (SUP)/R (EXH) type Common SUP/Common EXH VQ7 Valve stations 2 to 20 stations Note 1) Ports A, B location Valve C10 (10 One-touch fitting) C8 (8 One-touch fitting) C12 (12 One-touch fitting) Ports P, R 1/8 C4 (4 One-touch fitting) C6 (6 One-touch