Plug-in Unit

position 0.15 MPa Max. operating pressure Note 3) 1.0 MPa (0.7 MPa) VQ0 Single 0.15 MPa 0.2 MPa Min. operating pressure VQ4 0.15 MPa Double 3 position 0.15 MPa 0.2 MPa VQ5 1.5 MPa Proof pressure Ambient and fluid temperature VQZ 10 to 50C Note 1) Lubrication Not required VQD Push type/Locking type (tool required)/Locking type (Manual override) Note 5)/Slide locking type Note 5) Manual override 150

VS 8-2/VS 8-4

MPa 0.15 MPa 5 to 60C Note 1) Single Double 3-position 4-position (A) 4 (B) 2 Minimum operating pressure 10 to 60C Note 1) Ambient and fluid temperature Lubrication Manual override Impact/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation 1 (P) 5 (R1) 3 (R2) Not required (Non-lube) Push type (Tool required)/Locking type (Tool required) 150

7

size (D) Conduit U E 280 C (42) 45 T 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier A B IN OUT M 2 x P Port size L K J I F (D) (mm) Model Conduit Conduit terminal Electrical entry Port size P A B C E F I J K L U D M V 55 (61) T T 55 (61) U 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 108 77 47.5 ( ): Denotes the Normally Open (N.O.) dimensions. 150

Slit Valve

(Pa) (abs) Operating pressure differential (kPa) 4 or less Operating pressure range (MPa) (G) 0.45 to 0.6 6.5 x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 100 90 80 70 60 50 40 30 20 10 0 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 60 Suction flow 40 Air consumption 20 0 0 20 40 60 80 Suction flow [L/min(ANR)] Supply pressure [MPa] ZHP-15 ZHP-15 (Supply pressure: 0.35 MPa) 100 100 90 80 70 60 50 40 30 20 10 0 150

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

Bernoulli Gripper

Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 140 120 160 120 100 140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 300 200 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 250 160 140 200 120 100 150

Clean Regulator/Fluororesin Type

pressure (pilot pressure) Fluid Ambient and fluid temperature Valve leakage Tubing Integrated fittings With nut 0.08 1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150

CRQ2

Weight JIS Symbol (g) Standard weight Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Values less the weight of auto switch. Precautions Be sure to read before handling. Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Size Single vane Double vane Adjustment range of adjustment bolt (B) 90 145 150 1 25 Adjustment range of adjustment bolt (A) (S): 10 (D): 5 180 140 90 230 240 90 (S): 10 (D): 5 3 30 180 225 90 360 375 7 50 180 355 90 510 580 20 60 22.5 180 505 Allowable Load Positioning pin hole Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

08-cs2y-e

.: GR-L-005 (5 g), GR-S-010 (10 g), GR-L-150 (150g) 48

Magnet: None, Mounting: R (Front Block), Bore Size: 150 (1 1/2"), Stroke: 0150 ( 1 1/2"), Cushion: w/o Rubber Bumper, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: None, Mounting: C (Rear Pivot Mount), Bore Size: 150 (1 1/2"), Stroke: 0700 (7")

Series: NCA1 (Standard), Mounting: G (MF2, Rear Flange), Bore Size: 150 (1 1/2"), Stroke: 0200 (2")

Magnet: None, Mounting: C (MP4, Single Detachable Rear Clevis), Bore Size: 150 (1 1/2"), Stroke: 1000 (10"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC6 (Stainless Steel Rod)

Series: NCA1 (Standard), Mounting: C (MP4, Single Detachable Rear Clevis), Bore Size: 150 (1 1/2"), Stroke: 0150 (1 1/2")

Magnet: None, Mounting: C (Rear Pivot), Bore Size: 150 (1 1/2"), Stroke: 0700 (7"), Cushion: C (Rubber Bumper)

Magnet: None, Mounting: C (Rear Pivot Mount), Bore: 150 (1 1/2"), Stroke: 0250 (2 1/2"), Cushion: C (Bumper), Rod Boot: K (Neoprene), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Environmental Options: XC6 (Stainless Steel Rod)