The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

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U~ 01 ,-"" 1/6 7 (09 2(12.7 150 ,,, 12 to 14 17 17.5) 200 31B 221024 19 200 2. Grasp Ihe tube and push it in slowly, inserting it securely all the way into (he filling. 1/2 281030 2423.8) 200 Note} Numbers Inside ( ) are NPT Ihread dlmensJ()ns IN m_ l0 2kgf em 3.Aher fully inserting the tube, pull on il lightly to confirm that it WIll nol come out.

Speed Controller: Standard Type Large Flow In-line Type AS Series

L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 655

Flame Resistant

21 30 AS221F-G02-06W2D G1/4 17 13.2 18.5 17 7.2 25.2 34.4 20.2 42.8 1.2 36.8 17 46 AS221F-G02-08W2D 15.2 27.2 36.4 18.5 48 AS221F-G02-10W2D 18.5 35.3 44.5 21 50 AS321F-G03-08W2D G3/8 19 15.2 23 21 9.8 29.7 41.2 22.7 55.6 1.2 49.5 18.5 87 AS321F-G03-10W2D 18.5 31.6 43.1 21 89 AS321F-G03-12W2D 20.9 32.8 44.3 22 91 AS421F-G04-10W2D G1/2 24 19.5 28.6 25 12.4 33.6 47.9 26.8 65.3 1.2 56.7 21 150

D-F6N/D-F6P/D-F6B

Lead Wire Lead wires with a connector indication Lead wire length indication Part No. of Lead Wires with Connectors (Applicable only for connector type) D-M9BW (Example) L Model Lead wire length D-LC05 0.5 m Symbol Lead wire length D-LC30 3 m Length 0.5 m 1 m 3 m 5 m None 0.5 m 1 m 0.5 m 1 m 0.5 m 1 m 3 m Solid state 2) Reed 3) Tolerance 15 mm 30 mm 90 mm 150 mm 15 mm 30 mm 15 mm 30 mm

BP1000

0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4 MPa) Operating Parameters Operating pressure Gas Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Installation Internal volume Mass Select compatible materials of construction for the gas 15 psig (0.105 MPa) 30 psig (0.2 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 90 psig (0.6 MPa) 180 psig (1.2 MPa) 150

BP1000

psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) Operating Parameters Operating pressure Gas Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Select compatible materials of construction for the gas 15 psig (0.105 MPa) 30 psig (0.2 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 150

COQ2BP

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

I

CX>erOtno PrOSSU'B Qcera,tnQ TEMPROl"IQB -1o-ecn: \oltrout rreezno Mn ooerathQ 1l'n8 1.0 ncarcl to i:i-1.0 .i to ll'dM "'1lhn looo rrrce to tre hard 150< I /rn==i: I 1 111 I I 11 :1 I 11 l i -& Jt N.O.PN> cmtnJOUs toad Cl.l'J'en1 l150mA S"1tcttlo lrowencY 30iZ Mllter1el tl<

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150

Process Valve

6 to 8 (D, DZ) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) E P2 P1 C I (Grommet: G) J (DIN terminal: D, DZ) VNA H H VNB VNB D B (Air operated) 4 x 2 x 18 mounting hole SGC SGH B A VNC G F VNH VND A VCC Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model TQ VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150

Steam Valve

26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Standard 0.2 to 0.7 High-pressure type 0.2 to 1 Ambient and fluid temperature [C] 10 to 50 (No freezing) Maximum operating frequency [Hz] 5 Manual override (Manual operation) Non-locking push type Push-turn locking type (Manual) Non-locking push type (Manual) Pilot exhaust method Individual exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance [m/s2] *1 150

3 Port Air Operated Valve

Nil F N T RC G NPT NPTF Nil V Standard For vacuum Manifold Specifications Piping specifications Applicable stations Note) Manifold base Weight: W [g] Stations: n Applicable valve Series Base model 1P (SUP) port type 3R (EXH) port type Port size VV3PA3-41 Common VPA300 2 to 20 stations W = 110n + 90 1/4 VPA344 VV3PA3-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150

3 Port Air Operated Valve VPA3145/3165/3185 Series

Specifications Fluid Air Type of actuation N.C. only (N.O. only for vacuum) For ordinary pressure 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Operating pressure range Pilot pressure range Ambient and fluid temperature (C) Refer to the graph of pilot pressure. 0 (No freezing) to 60 Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) Mounting orientation Free 150

Plug-in Unit

position 0.15 MPa Max. operating pressure Note 3) 1.0 MPa (0.7 MPa) VQ0 Single 0.15 MPa 0.2 MPa Min. operating pressure VQ4 0.15 MPa Double 3 position 0.15 MPa 0.2 MPa VQ5 1.5 MPa Proof pressure Ambient and fluid temperature VQZ 10 to 50C Note 1) Lubrication Not required VQD Push type/Locking type (tool required)/Locking type (Manual override) Note 5)/Slide locking type Note 5) Manual override 150

VS 8-2/VS 8-4

MPa 0.15 MPa 5 to 60C Note 1) Single Double 3-position 4-position (A) 4 (B) 2 Minimum operating pressure 10 to 60C Note 1) Ambient and fluid temperature Lubrication Manual override Impact/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation 1 (P) 5 (R1) 3 (R2) Not required (Non-lube) Push type (Tool required)/Locking type (Tool required) 150

7

size (D) Conduit U E 280 C (42) 45 T 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier A B IN OUT M 2 x P Port size L K J I F (D) (mm) Model Conduit Conduit terminal Electrical entry Port size P A B C E F I J K L U D M V 55 (61) T T 55 (61) U 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 108 77 47.5 ( ): Denotes the Normally Open (N.O.) dimensions. 150