After tightening the clamp bolt by hand, tighten it further with hexagon bar wrench (nominal width across flats:4) Part No. . o N t r a P h c n I . o N t r a P c i r t e M e b u T . D . O f o r o l o C e s a e l e r n o t t u b g u l P t e k c o S g u l P t e k c o S f o r o l o C e s a e l e r n o t t u b e b u T . D .
M5 x 0.8 Hexagon width across flats 8 NL 5 Y Hexagon width across flats 12 Hexagon width across flats 10 F Hexagon width across flats 3 F Hexagon width across flats 2 D 3 D C C 2 2 A A B B Dimensions Dimensions (mm) (mm) N: 1/8 (Rc, NPT, NPTF) A B C D F Y N: M5 x 0.8 N: M8 x 1.25 Model A B C D Model ZPT10F-B5 F NL P F NL P F P 10 12 10 12.5 27 1.5 ZPT13F-B5 ZPT20F20 22 13 15 32 36 36 12.5
C24V 10% CO N SU M PTI O N CU RREN T AT CO N STAN T O U YPU T 120M a O R LESS I N PU T SI G N AL D I G I TAL 10bi t ( PARALLEL I N PU T) I N PU T I M PED AN CE 4. 7k O R LESS LI N EARI TY 1% F.
) A (A port reguralation) B (B port reguralation) 3 8 1 2 AXT512-19A-1 AXT512-19A-2 Interface for reverse pressure R1, R2 Individual EXH spacer Interface speed control VV72-R2-04 AXT510-32A Main EXH back pressure block plate AXT512-25A AN110-01 Silencer for pilot EXH 1.19-22 VS7-8 Manifold/Dimensions L: Dimensions Common EXH n L L1 Equation n: stations L1=56n+64 L2=56n+80 n: stations L1=56n
X) 25 l = 280 U side D side Stations 1 2 3 4 5 n For manual override J2 Manual override W T R N Z M 16 1 1 L 2 2 2 2 P = K (pitch) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n
Working vacuum pressure 60 kPa Horizontal lifting
(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
type) 2 x 1/8 3(R) port = Thread type Manual override 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) 2 x 4.5 Mounting hole 81 (Closed center) R 3 P 1 X 36.5 9 32 24.1 P 1 15.6 2 x 1/8 1(P) port = Thread type 10.2 Indicator light Stations 1 2 3 4 5 6 7 8 n D side U side 39.7 With plug connector/light B 2 B 2 20 14 A 4 A 4 5 14.6 2n x C2, C3, C4, M5, N1, N3 <4(A), 2(B) port>
Bore size (mm) Holding force 25 245 N 32 400 N 40 628 N Note) The holding force is the locks ability to hold a static load that does not involve vibrations or impacts, when it is locked without a load. Therefore, when normally using the cylinder near the upper limit of the holding force, be aware of the points described below.
Unlocked condition can be held in reversed order of Fig. 8. of the release bolt 3240 3 5063 4 80100 5 16 - W a r n i n g (1) Do not operate the release bolt until safety is confirmed.
Height 1710 x Width 1185 x Depth 955 HRSH150-Al-A 268 HRSH200-Al-A HRSH250-Al-A HRSH300-Al-A 344 Height 2020 x Width 1230 x Depth 1040 HRSH100-Wl-A 197 Height 1610 x Width 925 x Depth 955 HRSH150-Wl-A 227 HRSH200-Wl-A HRSH250-Wl-A Mounting/Installation Warning 2.
AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z
B1 A B 2 x P 1(IN), 2(OUT) port 2 x M5 Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge
(Page 73) Inclination of flow rate PD a F32 N 2000 0x07D0 0 R Refer to "Inclination and intercept".
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate
Bore size (mm) Holding force 25 245 N 32 400 N 40 628 N Note) The holding force is the locks ability to hold a static load that does not involve vibrations or impacts, when it is locked without a load. Therefore, when normally using the cylinder near the upper limit of the holding force, be aware of the points described below.