3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

T NPTF F G Note 1) R port of VQZ200 is only PF 1/16.

4/5 Port Air Operated Valve Series SYJA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SYJA5 20 1 M5 Body ported SYJA5 40 2 Base mounted Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3

VFRA3000

1 5 Port Air Operated Valve Series VFRA3000 How to Order SA 02 VFRA3 11 2 VA SA Thread type (Including pilot port) Function VA Nil Rc 2 position single 1 2 3 4 3 position exhaust center F N T 2 position double G NPT NPTF 3 position closed center VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

VZA2000

Nil T F Rc NPTF, NPT G Caution 3 position closed center 3 position exhaust center Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-1 2 Series VZA2000 Dimensions: Body Ported 2 position single: VZA2121-M5 2 position double: VZA2221-M5 2-2.8 mounting hole 2-2.8 Mounting hole Pilot port (A side) M5 x 0.8 Pilot port (A side) Pilot port (B side) 2-2.8

VHK

44.3 47.7 51 68 1 4 3 8 1 2 17 19 72 70 12 22 46 76.3 31.5 44.8 21.5 4 21.8 14 17.5 3.2 63 70 VHK-B2A 49 17 1 30 25 21.5 31 VHK-12F-02S VHK-12F-03S VHK-12F-04S 77.3 80.2 45.8 48.7 64 71 72 22 70 1 4 3 8 1 2 3 port valve Reference dimensions after insertion of R thread. 1(P)/2(A): Male Thread Effective area (mm2) Connection thread R Model Bracket mounting dimensions S (Width across flats) T

Size: 7 (Body Size 7), Style: 0 (Standard Formula), Operation: 1 (External Pilot Solenoid), Port Size: 12 (1+1/4), Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light+Surge Suppressor)

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Magnetically Coupled Rodless Cylinder / Low Profile And High Precision Guide Series CY1F

Cylinder / Low Profile And High Precision Guide Series CY1F 10,15,25 ll ll l h l pact mpact pact mp m ler overall length ler overall length ller overall length ll ll 29% reduction in height 29% reduction in height 2 29% reduction in height Overall length reduced 31% Ove Ove O 31% 31% 31% CY1F MY2H CY1H CY1F Height mm CY1H 10 15 25 Series CY1F CY1H 28 34 46 46 63 39.5 Overall length mm h i h h t

Stainless Steel One-touch Fittings Series KG

Weight (g) M T(M) L Part No. Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Confirmation of non-rotating accuracy 3-1 Rolling direction 3-2 Pitching direction + + + T Bore size (mm) Allowable rotary torque Non-rotating accuracy Deflection angle for eccentric load Allowable rotary torque T (Nm) Non-rotating accuracy () Non-rotating accuracy () Bore size (mm) Bore size (mm) 40 7 40 40 0.12 or less 0.3 or less 15 50 50 50 20 63 63 63 16

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

Rotary One-touch Fittings Manifold Series KM

Thead NPT T Applicable tube O.D. F (inch) Part No.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 F 4 4 6 6 6 6 6 T 6 6

Compact Cylinder Series NCQ8

1 r t !2 !

3 Position Cylinder Series RZQ

Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i PF2D540 o !0 u !0 !2ywr e !1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

By comparing this average pressure value with the set pressure value, switch output (ON//OFF) is determined. t (ms) t (ms) Time Switch output operation when normal ON OFF Time Switch output operation when anti-chattering function is used.