Digital Pressure Switch ( compatible)

Apply a tightening torque of 8 to 12 Nm.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

I1 = 0.03 x (0.02 + 0.01)/12 = 1.25 x 10-kgm I2 = 0.006 x (0.005 + 0.005)/12 + 0.006 x 0.007 = 0.32 x 10-kgm I = 1.25 x 10+ 0.32 x 10-6 I1 = m x (a + b)/12 I2 = m x (a + b)/12 + m x H I = I1 + I2 Inertial moment = 1.57 x 10-kgm Kinetic energy 6 1/2 x I x Allowable energy = 2 /t (: Terminal angular velocity) : Rotation angle (rad) 1/2 x 1.57 x 10-6 x (2 x ( /2)/0.2) Confirm that the load's

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper

Short Stroke Electric Actuator Series LX

234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09

Support Guide/11-LEFG Series

8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000

CV/MVGQ

2-wire Connector RB Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) J IC circuit 5 V, 12 V Grommet 12 V 2-wire DConnector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) -X Grommet 2-wire 12 V With diagnostic output (2-color indication) IC circuit 5 V, 12 V 4-wire (NPN) 20Lead wire length symbols

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

For Y terminal, it is up to 1.25 mm2 4. c Cable i outside diameter: 6 to 12 mm Note) For the one with the outside diameter ranged between 9 to 12 mm, remove the inside parts of the rubber seal u before using. u For obtaining the flow rate, refer to front t matter. y e o i o Magnifying figure Self-up screw 2 1 3 1316

MLU

6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 9-13-12 12 Series MLU Plate Cylinder with Lock Dimensions Axial foot style LY CL (mm) LH LS LH ZZ LT 114 132 140 166.5 LX

Fieldbus system EtherNet/IP compatible SI Unit

EX600-ZT1 (6) Assembled type connector PCA-1446553: For EtherNet/IPTM communication, M12 (4 pin) Plug, D code PCA-1578078: For power supply, 7/8 inch, Plug, Cable O.D. 12 to 14 mm PCA-1578081: For power supply, 7/8 inch, Socket, Cable O.D. 12 to 14 mm (7) Power supply cable PCA-1558810: Cable with 7/8 inch connector, Socket, Straight 2 m PCA-1558823: Cable with 7/8 inch connector, Socket,

EXxx-OMN0035CN

Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 EX600-DXB -31No.EX-OMN0035CN-A

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

FGE-C

FKM O V CY-24S SUS304/SWCH 001(FGESLA) 002(FGESLB) 003(FGESLC) FGE-CV SUS304 SUS304 M8X1.25XL30 SS400 M8X1.25 SS400 SS400 () 8/12 FGX-OM-L009-B 2 2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21 29 1) 2) 3) 3 1) (P5) (

HRX-OM-I051

Contact signal Table 8-12 Contact Signal Item Specification Connector No.

HRX-OM-K003

See Appendix 8.5 BAND/READ in Chapter 8 on page 8-12 on BAND/READY function (*1). TEMP SP+OFFSET value (*2) should be in the TEMP SP setting range defined in Table 5-8 Setting Screen on page 5-6. 5.3 Operation Screen HRW Series 5-8 HRX-OM-K003 Chapter 5 System Operation 5.3.10 Maintenance screen 1 Figure 5-12 Maintenance Screen Table 5-11 Maintenance Screen No.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fittings Series AS In-line Type 1

33 36.8 41.8 11 76 20.9 12 22 19.8 46 34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9 12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9 52.4 11.6 83.1 21.7 22 1/2" AS4001F-13 15-9-12

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 29.4 12 17.5 12.9 29.6 33.8 28.8 7.8 11.7 9.6 10 34.6 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 32.5 13 13.7 20.6 34.6 6 ASD330FM-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 10.6 14.2 11.8 12 32.1 27.1 R 1/8 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430FM-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430FM-02-08S

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

(Example) F9BV 3m.L (Example) F9BVL Refer to p.2.11-1 for auto switch specifications. 2.3-3 2 Finger Air Gripper Series MHR2/MDHR2 Model/Specifications 10 20 30 Nominal size 15 Action Double acting Holding force (N) (Effective value) (1) at 0.5MPa 12 33 58 External hold 24 12 34 59 Internal hold 25 Finger closing width (mm) Finger opening width 10 16 19 14 Opening/closing stroke (Both sides

VM

Toggle lever VM220-02-08 VM230-02-08 JIS Symbol 2 port Hexagon nut thick 6, across flats 27 EXH port (3 port only) 3 port Panel mounting hole 0.5 MPa supply 2-5.5 mounting hole 12 N F.O.F.