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ULUL1310Class2 6.2 2) AWG20(0.5mm (24V0V) 60 2) EMG AWG20(0.5mm (EMG+,EMG-) 60 8mm 21 - D (100) D 6.3 (CN2SW)ON (EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC)OFF (LEC)(EMG+,EMG-) 22 - (LEC) ()LEC6 DC24V 0V Ry EMG+ Ry EMG(1 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M

U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n2-One-touch fitting [4(A), 2(B) port] Applicable tube

Dual rod cylinder 6, 10, 15, 20, 25, 32 Series CXS 10-/11-/1221-/22How to Order Clean series 10 11 12 CXSM,CXSL CXSM,CXSL CXSL Relief type Vacuum suction type Relief type (with specially treated sliding parts) Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type L M Ball bushing bearing Slide bearing Nil S n 2 pcs. 1 pc. n pcs.

Solid State Auto Switch: Short Type Standard product (D-M9m) Protrusion How to Order Specications D-M9 5 B L Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 Wiring type 3-wire 2-wire Output type NPN PNP Lead wire length Wiring/Output type Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC B 2-wire N 3-wire, NPN P 3-wire, PNP Nil 0.5 m M 1 m L 3 m Z 5 m Power supply voltage 5, 12, 24 VDC

3 14 port side SOL 3 Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) ZNR 4 4 2 1 DC: Single COM M12 Connector: Wiring specifications (EVS1-01) 3 1 14 port side SOL 12 port side SOL Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) 5: Ground ZNR ZNR 4 2 2 4 5 DC: Double 3 3 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series

3 14 port side SOL 3 Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) ZNR 4 4 2 1 DC: Single COM M12 Connector: Wiring specifications (EVS1-01) 3 1 14 port side SOL 12 port side SOL Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) 5: Ground ZNR ZNR 4 2 2 4 5 DC: Double 3 3 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series

3 14 port side SOL 3 Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) ZNR 4 4 2 1 DC: Single COM M12 Connector: Wiring specifications (EVS1-01) 3 1 14 port side SOL 12 port side SOL Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) 5: Ground ZNR ZNR 4 2 2 4 5 DC: Double 3 3 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series

A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area So (mm2

://www.smcworld.com/ IDX-OM-W095 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 .

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

F.S.1 digit(253 ) 0.2F.S.1 digit 2%F.S.(25 ) NPN PNP 1 OFF 80 mA (NPN) 28 V () 1 V (80 mA ) 1 1.5ms (20,100,500,1000,2000,5000 ms ) 2 0 2, 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 3 MPa,kPa,kgf/cm bar,psi LCD 3 (X2) 1)/ 2) 1)4 (7 ) 2)4 (1 11 7 ) ON OUT1 4 0,10,50,100,500,1000,5000 ms -62No.PS-OMS0006CN-G ZSE20() ZSE20F() ISE20() IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 ()

IP65 -1060 -2070 () 3585RH() AC250 V1 50 M(DC50 V) 2F.S.(050 25)3F.S.(-1060 25) CEUL/CSARoHS 01 02 C01 N01 N02 A2 B2 R1/8 M50.8 Rc1/8 NPT1/8 R1/4 NPT1/4 M50.8 URJ1/4 TSJ1/4 M50.8 M50.8 C3604SUS316L PSE563 5.1 3 m 2 0.2 mm 1.12 mm PSE56--28: 2 5.1 3 m 2 0.2 mm 1.12 mm 193 g 200 g 194 g 201 g 187 g 203 g 193 g 101 g 108 g 102 g 109 g 95 g 111 g 101 g -12No.PS-OMG0005CN-E [mA]

CS1L125SCS1125, #2 CS1L140SCS1140, #2 CS1L160SCS1160, #2 CS1L180SCS1180, #2 CS1L200SCS1200, #2 CS1L250SCS1250, #2 CS1L300SCS1300, #2 The drawing shows with an auto switch.

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx

Symbol Applicable stations Mounting position U side D side Both sides M Special specifications 2 to 10 stations 2 to 10 stations 2 to 16 stations D U B Indicate special specifications separately on a manifold specification sheet. Note 2) The number of blanking plate assemblies is also included.