MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B H Dd9 L C D d Part no.

E-MY2B_E_A

Direct mounting Use M4 mounting screw shown in fig. 1 or M5 tap hole to mount the controller. fig. 1 Mounting by L type bracket Mount the optional L type bracket on the main unit using the two mounting screws M5X8L and install on the facility using hexagon socket head cap screws as shown in fig. 2.

PEEK

Features 1 Series L VM Solenoid Valve for Chemicals Solenoid Valve for Chemicals Piping/Mounting Variations Body ported M5 thread Tubing type Manual (Optional) Bracket (Optional) 2 x M5 x 0.8 Bracket (Optional) Tubing LVM11 LVM10/100 Base mounted Without sub-plate O-ring LVM09/090 LVM10/100 LVM15/150 LVM20/200 With sub-plate C B A PAT.PEND LVM (Rocker type) A Valve chamber volume B Body

15

CY1L CY1H CY1F Shock absorber CYP The RJ series soft stop shock absorbers fitted as standard DM10 M8 M6 M20 M14 -X (For 20) (For 10, 15) (For 6) (For 32, 40) (For 25) Technical Data 1487 CY1S Series Model Selection Selection Flow Chart Operating Conditions D: Bore size (mm) L: Stroke (mm) m: Load mass (kg) Va: Piston speed (mm/s) P: Operating pressure (MPa) E: Kinetic energy (J) Mounting

Plate Cylinder with Lock Series MLU

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 4 x MM thread depth J Cylinder tube outer circumference: Hard chrome plated + special treatment Note 1) 0 -0.1 L H B G E 2 x P (Piping port) G NN Effective thread length T (R) D X Mounting nut width across flats C NA I N W K N F F S + Stroke ZZ + Stroke Note 1) 50, 63: L 0 -0.2 8 x V Effective thread depth Y H A B E G Mounting nut width across

MGC

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

EXxx-OMY0004

P LED Table 10-28 P LED LED state Meaning OFF No safe communication Green ON Safe communication is running. Green Flash Safe communication is running. The controller is requesting operator acknowledgment 64 No.EX##-OMY0004 10.10.

Process Pump

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

CJP

A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

CJP

A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

Flow sensor

ZS-36-A2 2 station: 2 L-type brackets With mounting screws (M3 x 25 L) 2 pcs. ZS-36-A3 3 station: 2 L-type brackets With mounting screws (M3 x 35 L) 2 pcs. ZS-36-A4 4 station: 2 L-type brackets With mounting screws (M3 x 45 L) 2 pcs. ZS-36-A5 5 station: 2 L-type brackets With mounting screws (M3 x 55 L) 2 pcs. -11No.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

Dedicated Controller Series LC1 Uniaxial Type

input No., State (P-No.) label C-AND OR input time out subroutine call command General-purpose input No., State (P-No.) label C-OR AND input condition jump command General-purpose input No., State (P-No.) label J-AND Condition jump OR input condition jump command General-purpose input No., State (P-No.) label J-OR Program Control Commands Parameter value Mnemonic Classification Function

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

IDX-OM-Z004

200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2

IZx-OMT0049

For IZTC41-L (controller), IZTP41-L and IZTP42-L are applicable. IZTP41-L and IZTP42-L can be mixed. Transistor input/output type and IO-Link type cannot be mixed. Table2.

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.