Air Cylinder Series CM2

end) and Its Mounting Height Proper Auto Switch Mounting Position (Excluding Single Acting Type) (mm) Auto switch D-H7 D-H7C D-H7W D-H7BAL D-H7NF model D-C7 D-C80 D-C73C D-C80C D-A3A D-G39A D-K39A D-A44A D-A9 D-M9 D-M9W D-B59W D-B5 D-B64 D-G5NTL CJ1 Bore size A B B A B A B A B B A A B A B A 6.5 (4) 5.5 (3) 0 () 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

5 Port Solenoid Valve Series SV

14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Model 4, 2 (A/B) 1, 5, 3 (P/EA/EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-16 C8 0.89 0.22 0.23 0.22 0.21 0.98 C8 SS5V2-16 C10 2.3 0.50 0.56 0.28 0.18 2.7 Note) Value is for manifold base with 5 stations and individually operated 2 position type.

Guide Cylinder Series MGG

D-M9/M9W ~ = ~ = Hs 11 B A 16.5 8.5 Auto switch D-A9 D-M9/M9W D-C7/C8 D-H7 ~ = ~ = Hs 11.5 B A 16 8.5 Auto switch D-C7/C8 D-H7 D-B5/B6 D-G5/K5 ~ = ~ = Hs 14.5 B A 24.5 12 8.5 Auto switch D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 ~ = ~ = Hs 14.5 B A 11 8.5 Auto switch D-B7/B8 D-G7/K7 Auto Switch Mounting Height Auto Switch Proper Mounting Position (mm) (mm) D-G5/K5 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W

VQ20/30

VDW Option Enter together in order, counting from station 1 on the D side. 20 20 stations None DIN rail mounting DIN rail mounting (Without DIN rail) Nil D DO VQ VX2 U side D side Stations321 VX VX3 VXA A port VN P1 LVC How to Order Valves (For Manifold) LVA VQ M C6 2 1 1 1 G LVH Series/ Orifice size LVD Port size Symbol 2 3 Series VQ20 VQ30 LVQ VQ20 VQ30 Symbol C6 C8 C10 C12 Port size

Guide Cylinder/Compact Type Series MGC

For 32 or larger bore sizes, Rc, NPT and G ports can be selected. 403 Series MGC Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9 D-M9/M9W Hs B A 11 16.5 8.5 Auto switch D-A9 D-M9/M9W D-C7/C8/H7 Hs B A 11.5 16 8.5 Auto switch D-C7/C8 D-H7 D-B5/B6/G5/K5 Hs B A 14.5 24.5 12 8.5 Auto switch D-B5/B6 D-G5/K5 D-B7/B8/G7/K7 14.5 Hs B A 11 8.5 Auto switch

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting)/C8 (8 One-touch fitting) C6: PA/B 4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A, B port piping specifications SY3000 SY5000 SY3000 Operating pressure range External pilot operating pressure range MPa 2 position single Pilot

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PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.

51

D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

PFxx-OMJ0005CN

PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C()

Digital Flow Switch (Integrated display type)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -107No.PF-OMW0007-E Lead wire and connector (ZS-33-D) M12 conversion lead wire (ZS-33-DM) Connector cover (ZS-33-F) Attached the connector cover -108No.PF-OMW0007-E Revision history A: Contents are added. [July 2019] B: Contents are added. [January 2020] C: Contents are added. [April 2021] D: Contents revised in several places.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-F5 D-J5 D-B5, B6 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Model D-F5W D-J59W D-F5BAL D-F59F D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A3C D-G39C D-K39C D-A44C D-A44,A44C D-A59W D-F5NTL D-B59W D-G39,G39C D-K39,K39C Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-G39A D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-H7 D-H7C D-C73C D-C80C D-B5 D-B6 D-B59W MG MGP A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5

Large Size Vacuum Module: Series ZR

(Individual spacer) 82 96 (2000) 62 Digital pressure switch for vacuum 3 5 Individual spacer Function plate 4 x 5.7 (Mounting hole) A A A B B B 32.4 S Pitch P = 33 31 19 Adapter B A A A B B B Silencer case (Built-in silencer) L2 L1 4 A: Release flow rate adjusting needle with lock nut L H SET Suction filter Adapter D 9 Individual spacer Pressure switch for vacuum Pressure setting trimmer

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 21 7 35 17.5 A A A A A 20.9 (DIN 22.1) (DIN 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) Max. 13.5 47.5 (Light/surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 85.4 77.9 52.6 [59.6] 66.6 M8 x 1 57.1

Modular Type Lubricators Series AL

5 is attached. 949 Series AL800/900 Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1 4

Serial Transmission System Series EX250 Series EX500

PWR COM D D D D D D 3 2 1 Station D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Note) Available with manifold block for station addition. Refer to pages 77 and 81 of SV catalog (ES11-81A).

VQC

B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.