NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

/K39 D-G39A/K39A D-F7/J7 D-J79C D-F79F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F59F D-F5NTL D-G39C/K39C D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Y5/Y6/Y7/Y7V D-Y7BAL D-Y7W/Y7WV D-M5 D-M5W D-M5TL D-P3DW D-P4DWL D-F9G/H D-Y7G/H D-G5NBL D-F7NJL D-F6 D-F8 Solid state auto switches Reed auto switches D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C

5 Port Solenoid Valve Series SQ1000/2000

D Note 1) C Note 2) Note 1) Except double (latching) Note 1) The function symbol is D for double solenoid specifications.

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

High Vacuum Angle Valve

D-G

Manifold Specifications

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

Table of Contents

D. Applicable tube O. D.

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve

If the mounted valve is N.O., apply pressure to the 3(E) port and exhaust air from the 1(P) port. 4 Series VV100 3 Port Solenoid Valve/D-sub Connector Connector Type Manifold Plug-in How to Order Valve for Connector Type Standard V1 1 U 0 C4 T D 5 C D 1 C Z J 0 C4 5 With switch V1 Individual wiring [For plug-in mixed mounting] T D Note) See page 13 for the dedicated non plug-in individual

VQ20/30

VDW Option Enter together in order, counting from station 1 on the D side. 20 20 stations None DIN rail mounting DIN rail mounting (Without DIN rail) Nil D DO VQ VX2 U side D side Stations321 VX VX3 VXA A port VN P1 LVC How to Order Valves (For Manifold) LVA VQ M C6 2 1 1 1 G LVH Series/ Orifice size LVD Port size Symbol 2 3 Series VQ20 VQ30 LVQ VQ20 VQ30 Symbol C6 C8 C10 C12 Port size

Table of Contents

C D E F Dimensions Part no.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) D Cylinder port size D D VQ1000 VQ2000 Special wiring specifications (except double wiring) Note 6) Regulator unit with 1 unit Note 4) Regulator unit with 2 units Note 4) Symbol C4 C6 C8 CM G1 G2 G3 J Symbol C3 C4 C6 M5 CM Port size With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch

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Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16