Compact 5-Port Solenoid Valve

PROFINET 3A M12 connector (4-pin, Socket, D-coded): 2 pcs. 7/8 inch connector (5-pin, Plug): 1 pc. 7/8 inch connector (5-pin, Socket): 1 pc.

Combination Cylinder

17 17 22 B2 26 32 32 41 BC 38 45 45 52 BN 80 90 90 BZ 57.5 69 69 76 C1 30 37 37 D 8 10 12 14 E 20 F 13 13 13 16 FD 7 7 7 7 FT 4 4 4 5 FX 60 60 60 66 FY 36 FZ 75 75 75 82 GA GB 8 8 8 11 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 MGQ 0 0.033 20 25 32 40 73.5 0 0.033 0 0.033 0 0.033 83.5 26 26 MGG 83.5 100.5 47.3 90.5 32 MGC (mm) MGF GC 8 9 9 8 GD 55 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 b 4 7 7 7

VQZ1000/2000/3000

For model no. for Onetouch fittings for P , R port and silencer, refer to page 2-7-5. 2 2 1 5 P 3 (54.5) 2-G 1/16 3(R2), 5(R1) port Rc 1/8 1(P) port L plug connector (L): VQZ2120 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2120 1(R)-Y-C4/C6/M5 Indicator light 300 98 (Lead wire length) 68 Pg.7 31 <36> Applicable cable O.D. 101.5 MAX. 10 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23

HRX-OM-S004

(-)7 Mod bus Communication speed 19.2 (-)7 Slave address ---(1)7 Communication speed ---(9.6)7 communication BCC ---(ON)7 protocol Simple Data length ---(8BIT)7 Parity check ---(NON)7 Stop bit length ---(2BIT)7 Response delay time ---(0)8 Communication range ---(RW)7 Contact input signal 1 RUN Contact input signal 1 type ALT Contact input signal 1 delay timer (time delay) of reading ---(0

ZP

1 A14 M14 x 1 Type Symbol Size Pad diameter [mm] 10 to 16 20 to 32 40, 50 i Lock ring Lock ring unit A5 M5 x 0.8 1 A6 M6 x 1 1 1 1 A8 M8 x 1 1 1 Part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Limited) LE-CSE-SA (Note) Signal layout (Note) Signal layout LE-CSE-RA 2 6 10 (Note) Signal layout 4 2 8 6 10 LG 8 4 MRR LG 9 SHD 7 5 MR 3 P5 1 MRR or 1 5 9 8 6 P5G 4 MRR 2 BAT 1 3 7 9 5 3 7 P5 BAT P5 MR BAT MR LE-CSE-SB View seen from wiring side.

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

01 02 A, B P, EA, EB 3 4 5 6 7 8 Option 1 8 Side Bottom Common Rc Rc Rc M Mixed Individual 1 4 1 4 Stations Side Bottom Individual Common 2 stations 02 For bottom ported, Rc 1/8 is only available.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 1> 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

Modular Design with Uniform Body Style

V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 110 35.5 50 75.2 40 55 9 18 7 50 65 AC40-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 110 35.5 50 80.2 40 55 9 18 7 50 65 AC50-V-D 3/4, 1 1/8 1/

5

6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.

KJ

Note) D: Max. diameter 7 8.4 12.7 15.3 13.2 15.2 13 M5 x 0.8 3.2 2.7 15.4 R 1 8 10 1/8> 0.9 0.9 13.7 15.1 15.3 15.7 14.7 16.7 M3 x 0.5 M5 x 0.8 7 9.3 15.6 12.7 4 4.5 4.5 16.4 R 1 8 7 10 4.5 4.5 11 11 16.1 17.8 M5 x 0.8 13.5 17.4 11.6 6 18.5 R 1 8 10 1/8> 2-applicable tubing T (With seal) 15-2-6 7 Miniature One-touch Fittings Series KJ Union Tee: KJT Applicable tubing O.D.

0.4

Digital unit Analog unit 1 2 3 4 5 6 7 8 Valve stations I/O unit stations 1 2 Note) Serial transmission kit VV5QC11-08C6SD6Q2N2 1 set Manifold base part number VQC1100N-51 2 sets Valve part number (Stations 1 to 2) VQC1200N-51 5 sets Valve part number (Stations 3 to 7) VVQ1000-10A-1 1 set Blanking plate number (Station 8) EX600-DXPD 1 set I/O unit part number (Station 1) EX600-

REA/REB

1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

REA/REB

M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless

HRX-OM-Q026

Monthly check . 7-4 7.2.3 Inspection every 3 months . 7-5 7.2.4 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1 Discharge of the circulating fluid . 7-8 7.4.2 Discharge of the facility water (Water-cooled type) . 7-9 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRSH100/150/200/250/300-A-20. 8-1 8.1.2 HRSH100