Stations: 6 Stations, Port Size: ø6 One-touch Fitting, SI Unit: CC-LINK, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, SI Unit: w/o SI Unit, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 8 Stations, Port Size: ø6 One-touch Fitting, SI Unit: CompoNetâ„¢, Positive Common, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 8 Stations, Port Size: ø6 One-touch Fitting, SI Unit: Mitsubishi MELSECNET/MINI-S3 Data Link System, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 8 Stations, Port Size: ø8 One-touch Fitting, SI Unit: SUNX S-LINK System 16 Point Output, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 8 Stations, Port Size: 1/4" One-touch Fitting, SI Unit: Mitsubishi MELSECNET/MINI-S3 Data Link System, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 8 Stations, Port Size: Elbow Top Ported w/ø6 One-touch Fitting, SI Unit: SUNX S-LINK System 16 Point Output, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, SI Unit: SUNX S-LINK System 16 Point Output, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust

Stations: 8 Stations, Port Size: ø6 One-touch Fitting, Cable Length: 5.0m Cable 20 Pin, Option 1: None, Option 2: Name Plate, Silencer, CE Compliant: -

Stations: 8 Stations, Cylinder Port: ø4 One-touch Fitting, Connector Entry Direction: Top Entry, Cable Length: Cable, 3m, Option 1: None, DIN Rail Length: Not Applicable, Option 2: Name Plate, Silencer

EX600-WEN_WSV.eng

Wireless communication connection status PB72, 02231, Espoo, Finland W-NS Restorable error is detected. (LED flashes when more than one diagnostic information item is detected.)

MXU

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-:U'7 9 '7 h '7 t :-'e-ns.--~ t'\ 2Mounting hOleS\ manual overrIde uL.--, . .JoU D~~ 0.22(5.6) Dia :1--;: _ . -r---r r-' !I -,zr n r y'~[ ~ ~I~@ ~ u Ll L4JE ItAII co ... ,,!

-fl Seies

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

MXU

34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

EX120/121/122

M12, 5 pins, plug) Power supply connector (M12, 5 pins, plug, reverse key) Power supply connector (M12, 5 pins, plug, reverse key) BUS BUS 59.8 59.8 59.8 PWR PWR PWR Ground terminal 63 Ground terminal Ground terminal 63 63 EX250-SCA1A (CANopen) EX250-SEN1 (EtherNet/IP) EX250-SCN1 (ControlNet) Position indicator LED Position indicator LED Position indicator LED SI UNIT PWR CAN PWR(V) PWR NS

e

humidity range Storage temperature range Storage humidity range Withstand voltage Insulation resistance Noise resistance 35 to 85%RH (No condensation) 10 to 60C (No condensation and freezing) 35 to 85%RH (No condensation) Between all of external terminals and the case: 500 VAC for 1 minute Between all of external terminals and the case: 50 M(500 VDC) 1000 Vp-p Pulse width 1 s, Rise time 1 ns

EX260-SDN_eng

MS status Description NS status Installation Green On Green On On-line state, The device has connections in the established state.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.