Regulator

Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11-12 8. Operation and Adjustment 13-14 9. Trouble Shooting 15-16 10. How to Replace the Components 17-24 10-1. Diaphragm Assembly Replacement 17 10-2. Valve Guide Assembly and Valve Assembly Replacement 18 10-3. Square Embedded Type Pressure Gauge Replacement 19 10-4.

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Model Selection 1

] (170) 0.7 0.8 0.75 Subsonic [660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg

VZ3000

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 7 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: Rc, Control Unit: A (Air Filter w/Auto Drain, Regulator, Air Release Valve), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: N (NPT), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 1 (100VAC 50/60HZ)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: N (NPT), Control Unit: MP (Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: T (NPTF), Control Unit: MP (Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 1 (100VAC 50/60HZ)

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 7 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 100VAC 50/60HZ

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 4 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: NPT, Control Unit: Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 4 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: NPTF, Control Unit: Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 100VAC 50/60HZ

ARJ310

01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features

VCL

Class 3 v v v Class 2 v v Port size 1/8 ( 6A) 1/4 ( 8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 v v v v Symbol 01 02 03 04 06 VCA VCB VCL Electrical entry Orifice diameter G Grommet C Conduit VCS Class 3 v v v v v Class 2 v v v v Orifice dia. (mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.