Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: N (NPT), Control Unit: C (Air Release Valve, Blank Plates for Filter Regulator & Press. Switch), Voltage: 5 (24VDC)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF), Control Unit: C (Air Release Valve, Blank Plates for Filter Regulator & Press. Switch), Voltage of Air Release Valve: 5 (24VDC)

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: NPTF, Control Unit: Air Release Valve, Blank Plates for Filter Regulator & Press. Switch, Voltage of Air Release Valve: 24VDC

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: NPT, Control Unit: Air Release Valve, Blank Plates for Filter Regulator & Press. Switch, Voltage: 24VDC

C76

Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89 151 to 200 201 to 300

C76

-45 to 6-10-46.

Table of Contents

63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

MGP

12 1 1 12 12 12 0.5 10 20 30 31 50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50

Environment

Nil Without cable 2 2 5 5 A 10 !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

, Ripple (p-p) 10% or less (with power supply polarity protection) 40 mA or less NPN or PNP open collector: 2 outputs (selectable) 80 mA 28 V (with NPN output) 2 V or less (with load current of 80 mA) 2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000 and 2000 ms) 0 to 101 kPa 10 to 105 kPa Maximum load current Maximum applied voltage Residual voltage

CV/MVGQ

26 0 0.033 32 0 0.039 10 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm

CV/MVGQ

10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 2 Series CV Valve Mounted Cylinder

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

PSE530/200

Pressure Sensor/Sensor Range ZSM Sensor supply pressure 101 to 101 kPa (Compound pressure) (Vacuum) (Low pressure) (High pressure) PF2 PSE533 10 to 101 kPa 10 to 101 kPa 0.1 to 1 MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor IF SET If the controller is equipped with a unit switching function, unit setting can be changed.

Air Cylinder Series CA2

flats KA D FV FY E B H1 AL B C K A N F N S + Stroke H FT FZ FX ZZ + Stroke (mm) Bore size (mm) A AL FB B B1 C D E F FV FD FT FX FY FZ G H1 J K KA 40 30 27 71 60 22 44 16 32 10 60 9.0 12 80 42 100 15 8 M8 x 1.25 6 14 50 35 32 81 70 27 52 20 40 10 70 9.0 12 90 50 110 17 11 M8 x 1.25 7 18 63 35 32 101 85 27 64 20 40 10 86 11.5 15 105 59 130 17 11 M10 x 1.25 7 18 80 40 37 119 102 32 78 25 52

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

Vacuum Unit

Model (Sensor unit: Standard model number) ZK2-PS1-A (PSE541) ZK2-PS3-A (PSE543) Rated pressure range 0 to 101 kPa 100 to 100 kPa Proof pressure 500 kPa Output voltage 1 to 5 VDC Output impedance Approx. 1 k Power supply voltage 10 to 24 VDC 10%, Ripple (p-p) 10% or less Current consumption 15 mA or less Accuracy 2% F.S. (Ambient temperature at 25C) Linearity 0.4% F.S.

Part Number Description: MFLD ASSY 10-STA   Product Line: V   Product Line Description: VALVE   Family Code: 351   Family Description: VV*FS* MANIFOLD VFS SERIES   Class Code: QM   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

1.63

101 200 0.1 0.1 10 25 26 100 101 200 Stroke (mm) Stroke (mm) MGPWL32 to 63, MGPWA32 to 63 (27) L = 50 mm, V = 400 mm/s or less (28) L = 100 mm, V = 400 mm/s or less 100 100 63 63 63 63 63 Load mass m (kg) Load mass m (kg) 63 50 50 50 50 50 10 10 50 40 40 40 40 40 40 32 32 32 32 32 32 1 1 10 50 51 100 101 200 10 50 51 100 101 200 Stroke (mm) Stroke (mm) 510 Compact Guide Cylinder/Wide Type