HRX-OM-O021

Product Warranty HRS Series 10-2 Revision Rev UDec.2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

IDX-OM-W011

L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011

HRX-OM-W058

HRS-R Series Product Warranty 10-1 HRX-OM-W058 Chapter 10 Product Warranty 6. Request to customers Proper use and maintenance are essential to assure safe use of this product. Be sure to satisfy the following preconditions.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

JXCx-OMU0026

1000 1000 50 40 10 100 0.0 0.0 5.0 Axis 1 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 2 Axis 2 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Axis 3 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Movement (ex.)

Air Slide Table Series MXW

moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 Maximum moment (Nm) Maximum moment (Nm) 30 40 (Nm) 50 MXW20 25 30 40 Pitch moment Yaw moment Roll moment MXW20 20 Model Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 10 15 5 5 3 MXW8 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 2 1.5 50 100 200 300 500 110 110

Compact Cylinder

15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13 15 17 19 21 23 25 27 20 16 1.0 25 15 18 21 24 27 30 33 37 40 43 32 27 32 36 41 45 50 54 59 63 67 12 0.4 40 42 48 54 60 66 73 79 85 91 97 0 10 20 30 40 50 50 91 101 111 121 131 141 151 161 171 Cylinder stroke [mm] 63 130 140 150 159 169 179 189 199 209 80 240 255 270 285 300 315 329 344 359 With Magnet for Auto Switch

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

HRX-OM-Z002

Scope of Warranty" HRLE Series Product Warranty 10-1 HRX-OM-Z002 Chapter 10 Product Warranty 6. Request to customers Proper use and maintenance are essential to assure safe use of this product. Be sure to satisfy the following preconditions.

MXW

15 15 K A 35 20 26.5 A 3 Z N-M5 x 0.8 thread depth 10 (N 1) x H G H 6 Bottom through-hole 4.2 M5 x 0.8 thread depth 10 GG 5H9 +0.030 depth 4.5 Bottom through-hole 4.2 0 F E 5H9 +0.030 depth 4.5 0 (mm) E F G Model GG H J K L N Z MXW12-100 91 123 82.5 30 35 114 35 51 5 280 MXW12-125 111 158 102.5 32.5 35 137 60 76 6 330 MXW12-150 136 182 127.5 47.5 40 164 85 101 6 380 8-7-13 14 Series MXW

ZQ-OM01301

ZQ-OM01301-A 9.4 Vacuum Switch Specification ZSE10 Pressure switch Pressure switch for Product Number Vacuum vacuum with for compound pressure switch pressure energy saving function Rated pressure range [kP] 0 to -101 -100 to 100 Set / display pressure range [kPa] 10 to -101 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas

MGQ

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

EXxx-OMN0027CN

PLC H.T. ) Enable 1 (SC_MonSs) Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 (Range) -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary PLC 3 (D_Format) Sign & Magnitude 2S Complement None 2 2AVG 2 4 (Filter) 4AVG 4 8AVG 8 Enable 0.5 5 (Over_Rng) Disable Enable 0.5 6 (Undr_Rng) Disable Enable 1 (Upr_Lmt) 7 Disable Enable 1 (Lwr_Lmt) 8 Disable

Electric Actuator / Guide rod Slider

offset=10 Changed to Origin offset-10 Origin 50mm 0 10 20 30 40 50 CCW CW Stroke[mm] Origin 50mm 10 20 30 40 50 60 CCW CW Stroke[mm] Origin 50mm -50 -40 -30 -20 -10 0 CCW CW Stroke[mm] Origin 50mm -40 -30 -20 -10 0 10 CCW CW Stroke[mm] Origin 50mm -60 -50 -40 -30 -20 -10 CCW CW Stroke[mm] -25- 4.

IDX-OM-W017

L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series

Rotary Cylinder Series MRQ

Symbol Specifications/Description Intermediate stroke Rod-end female thread Change of angle adjustable range Long Stroke (101 to 200 mm) MSQ X1 X2 X5 X10 Linear Motion Parts/Standard Stroke MSZ 32, 40 Standard stroke (mm) Size 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 CRQ2X MSQX Refer to page 352 for other intermediate strokes.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

ZL3-OM00601

Vacuum Pressure switch for vacuum with for compound pressure switch energy saving function pressure Rated pressure range [kPa] -101 to 0 -100 to 100 Set / display pressure range [MPa] -101 to 10 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas and non-flammable gas Power supply voltage: [VDC] 12 to 24 10%, ripple (p-p), 10%