Mist Separator

AMX-OMZ0093 PRODUCT NAME Mist Separator MODEL / Series / Product Number AM50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AM60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1. Bowl assembly for AM50 10 6-2.

Micro Mist Separator

Bowl assembly for AMD50 10 6-2. Bowl assembly for AMD60 11 7. Assembly of Optional parts 12 8. Operation and Adjustment 13 to 14 8-1. Discharge from the product with drain cock 13 8-2. Manual drain discharge from the auto drain 14 9. Troubleshooting 15 10. How to Replace the Components 16 to 17 10-1. Bowl assembly Replacement 16 10-2. Element Replacement 17 11.

Process Valve

table below G (Grommet terminal: E) H (Conduit terminal: T) I (DIN terminal: D) In the case of EZ or TZ, the length is longer by 10 mm.

LEC-OM034xx

CN2: TB/PC connector.33 9. 1 How to use.33 10. LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Multistage Ejector Series ZL112/212 1

(kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

2/3 Port Valve for Various

Allowable voltage fluctuation is 10% of the rated voltage.

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

VXR21/22/23

Allowable voltage fluctuation is 10% of the rated voltage.

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Air Suction Filter With One-touch Fittings Series ZFB 1

Air suction filter with One-touch fittings Applicable model Size Symbol Tubing size 04 ZFB100 ZFB100 ZFB200 ZFB200 ZFB300 ZFB300 10 4 Basic type Metric size Inch size 06 6 Flow (l/min (ANR)) MAX.20 MAX.50 MAX.75 Symbol 100 200 300 Tubing size Metric size JIS Symbol 08 8 Release button: Blue 10 3 16 05 101 201 301 401 ZFB101 ZFB101 ZFB201 ZFB301 ZFB401 " MAX.20 MAX.30 MAX.60 MAX.100 Metric

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

Series SY100 3 Port Solenoid Valve Rubber Seal

SY SY100-77-1A 10 stations 10 P R P port SYJ M5 X 0.8 Note 1) Piping to exhaust port not possible. VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ...

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN. 2.

AIR CYLINDER

Cylinder component Apply grease to the individual component, shown in the table 10. The following amount is needed per one 100 stroke cylinder. STROKE or 100mm and more Table 10. Grease apply amount 2 125 140 160 Portion to apply 100st 1517 2022 2426 50st Up 3 3 3 For grease, use lithium soap group grease JIS #2 3. Mounting seal 21 - .

LEC-T1_C

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

XL-OMV0005

-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 Standard B2401-P8V B2401-P10V (3) Special B2401-P8 B2401-P10 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Nut assembly (9) SUS304 XL1A50-10-1 XL1A80-10-1 Note 1)

ZSE30/ISE30

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14