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IDFC6010 450.8MPa30 2.8 m 3/min 1.09 1.02 1.06 3.3 m 3/min 7.2 GWP 1 (GWP) GWP Regulation EU No 517/2014 Regulation (EU) No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 R410A 2,088 2,090 IDFC60/70/80/90 Series 7-2 IDX-OM-W095 7.3 Port size Compressed air inlet Compressed air outlet Port size B A E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161

Note 1: This product is hermetically sealed and contains fluorinated greenhouse gases (HFC). 7.2 Refrigerant and GWP value IDFA60/70/80/90 Series 7-2 N M L O K H IDX-OM-V020 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D E F G H J K L M [N] O P IDFA60 R1 307 745 605 161

Description Maintenance/Service Work Description Date IDFA6E-20 161 16-1 Service Record Revision Revision AJan.2022 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2019 SMC Corporation All

80/90 Series 7-2 N M L O K H IDX-OM-V024 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Power cable entry [IDFB60-11: Power cord with plug, length 110(2800)] Unit :inch (mm) Model Port Size A B C D E F G H J K L M N O P 12.1 29.3 23.8 6.3 15.9 26.8 2.8 13.0 27.7 14.0 5.0 IDFB60 R1 (307) (745) (605) (161

S. or l ess O perat i ng t em perat ure 0 t o 50( N o dew condensat i on) St andards CE m arki ng, U L( CSA) Encl osure I P65 I P65 equi val ent M odel I TV10 0 I TV20 0 I TV30 0 Si ze ( m m m m m m ) ( W i t h adapt or) 50 50 161 50 50 183 66 66 204 W ei ght ( N o opt i on) 330 430 730 9 Com m uni cat i on speci f i cat i on ( Com m on) I t em Speci f i cat i ons Rem arks Fi el d bus CCLi

mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10, 20, 30, 40, 50 MXS6 119 102 85 68 51 34 170 281 241 201 161

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size

Operating Piston area Working pressure [MPa] [mm] [mm] direction [mm2] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 10 32 12 OUT 804 161 241 322 402 482 563 643 724 804 IN 691 138 207 276 346 415 484 553 622 691 40 16 OUT 1257 251 377 503 629 754 880 1006 1131 1257 IN 1056 211 317 422 528 634 739 845 950 1056 50 20 OUT 1963 393 589 785 982 1178 1374 1570 1767 1963 IN 1649 330 495 660 825 989 1154 1319

9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161

tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18 35 53 176 268 32 80 161

62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151 126 101 75.6 50.4 252 IN 25.2 440 377 314 251 188 126 628 OUT 62.8 M L 10 CXS 20 330 283 236 188 141 94.2 471 IN 47.1 687 589 491 393 295 196 982 OUT 98.2 M L 12 CXS 25 529 454 378 302 227 151 756 IN 75.6 1126 965 804 643 482 322 1608 OUT 161

Basic weight Size 22.5 Single vane 162 90 1 Positioning pin hole 25 161 180 261.5 90 Adjustment bolt (A) Adjustment bolt (B) 3 30 259.5 180 For 90 rotation Single vane (S): 80 to 100 adjustable 440 90 7 50 436 180 675 90 20 Adjustment bolt (A) adjustment range Adjustment bolt (B) adjustment range 60 670.5 180 180 Allowable Loads Do not permit the load and moment applied to the table to exceed

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107

2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161

TY TZ e f Q 1 1 2 32 M10 x 1.25 58 38 16 32 15 11 37 31 3/8 39 141 11 2 113 20 28 58 20 98 52 21.5 15 25 to 1800 1/3.5 stroke 40 M10 x 1.25 65 45 12 32 15 11 36 30 3/8 42 141 11 2 113 20 28 69 20 109 52 12 15 25 to 1800 50 M10 x 1.25 76 52 15 40 19 11 43 35 1/2 46 155 13 2.5 121 25 33 85 25 135 55 15 15 25 to 1800 63 M12 x 1.5 90 63 15 42 19 14 43 35 1/2 52 163 15 2.5 132 31.5 43 98 31.5 161

Refer to the Made to Order specifications on page 21 for details. 2 Series MY1W Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Piston area (mm) 0.3 0.4 0.5 0.6 0.2 0.7 0.8 16 200 40 60 80 100 120 140 160 20 314 62 94 125 157 188 219 251 25 490 98 147 196 245 294 343 392 32 804 161 241 322 402 483 563 643 40 1256 251 377 502 628 754 879 1005 50 1962 392 588 784 981 1177

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161

PB 0103 1 5 Gasket Subplate Buna N AXT 33112-2 18 Screws Pilot Cover (4) AXT 334.1G1 B o E G H K il N 127) 0.63 (161 1.42 {36) 0,91 123) 0.al (15.5) 1.24 (32) 6.10 (155) 2.4e (63) (62) 2.O5 <52) ?.o1 (51) l2B 1.06 1 7 Hold Down 8olls {8.32 x 1 9'61(2) NXT 333,17.5 Mi(tne ln Parenlhess NVSA45l4 DETAIL REF. 0EscRrPTtol{ MATERIAL PAB' NO. 1 Body Alum.

, Center or Side Lug .50 STOP TUBE REQUIREMENTS / TABLE 2 L (in) Tube Length (in) 0-40 0 41-50 1 Pivot and Rigidly Guided Side-Tapped, Head or Cap Flange, Tie-Rod, Center or Side Lug 51-60 2 61-70 3 .70 71-80 4 81-90 5 91-100 6 101-110 7 111-120 8 121-130 9 131-140 10 Supported but not Rigidly Guided Side-Tapped, Head or Cap Flange, Tie-Rod, Center or Side Lug 141-150 11 151-160 12 2.00 161