Fieldbus system PROFINET compatible SI Unit

ON US2 is present. 41 No.EX-OMW0011-B 6.4.4.

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

Refer to Auto Switch Mounting on page 10 3-3-2 for details. 28/28 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Solenoid Valve

Appropriate tightening torque 0.8 to 1.0Nm 63 No.SQ1000V-OMQ0002-B Revision Specific Product Precautions Manifold Options 2020.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

Mini Rotary Actuator

Auto Switch Rotation range / Actuation / most sensitive position D-M9 auto switch D-F8 auto switch Size Rotating Operation Operation A B angle Hysteresis Hysteresis angle angle (mm) (mm) angle angle m m 90 20.5 16.5 05 46 10 20 10 180 23.2 19.2 90 22.4 18.4 1 41 10 15 10 180 25.6 21.6 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating

Electric Actuator Miniature Rod Type Miniature Slide table Type

This may cause a malfunction due to an increase in sliding resistance, or use a freely moving connector (such as a floating joint). 41 - 7.3 Handling Caution 1. When the pushing operation is used, be sure to set to [Pushing operation]. Also, do not hit the workpiece in positioning operation or in the range of positioning operation. It may damage and malfunction.

XLG Series

) External seal (maintenance part) Heater (option) Pilot port (Pressurized / Totally closed) Axial seal (material : FKM) Scraper (Material : FKM) Valve (material : SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171 66 2 11 55 41

SI unit for EtherNet/IP TM

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. EtherNet/IPTM is a trademark of ODVA. 2012-2022 SMC Corporation All Rights Reserved No.EX-OMP0013-E

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6 3 11-/22-MXP 6 5 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41

CXT

MGQ Theoretical Force MGG (N) MGC IN OUT Cylinder bore size (mm) Operating pressure (MPa) Operating direction Piston area (mm2) 0.7 0.5 0.3 MGF 84.8 IN 59 42 25 12 113 OUT 79 57 34 CY1 151 IN 106 75 45 16 201 OUT 141 101 60 MY1 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

MXU

Area: (800) 258-9200-www.stevenengineering.com Minimum Operating Pressure (MPa) Symbol Specifications Min. operating pressure (MPa) 6 0.12 10 0.06 16 CX Bore size (mm) -XB13 Low speed cylinder (5 to 50 mm/s) 0.06 DTheoretical Output (N) -X Operating pressure (MPa) Operating direction Bore size (mm) 0.7 0.5 0.3 2015 11 6 IN 6 20 14 8 OUT Data 46 33 20 IN 10 55 39 24 OUT 121 86 52 IN 16 141 101

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

FILTER REGULATOR

(Diaphragm assembly, square embedded pressure gauge and pressure gauge adapter) Disassembly drawing: Change note on parts reclassification. '19.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 20 101 6 X168 CX helical insert thread 186 166 145 124 104 83 62 41 207 8 X169 2 built-in magnets

Air Filter

Sep. 2021 A B C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Compact Cylinder/Guide Rod Type Series CQM

CQS Unit: N Theoretical Output Mass CQ2 Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch RQ 0.3 0.5 0.7 25 Bore size (mm) Cylinder stroke (mm) 59 42 IN 12 100 35 30 15 20 25 5 10 40 45 50 75 CQM 79 57 OUT 34 12 16 20 25 32 40 50 63 80 100 69 77 86 60 44 52 106 75 IN 45 16 97 108 87 56 67 77 MU 141 101 OUT 60 167 152 92 107 122 137 183 198 213

Lubricator

A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Parallel Style Air Gripper Series MHZ

-X MRHQ MA 5 5.4 D6.2 Note) Through-hole mounting is not possible when using the auto switch at the square groove. 417 Series MHZL2 Dimensions MHZL2-16 Double acting/Single acting Basic type 36 (41) The values inside ( ) are dimensions for the single acting type. 16 2 x M4 x 0.7 thread depth 4.5 (Mounting thread) 3H9 depth 3 +0.025 0 0.02 6.5 17H9 depth 2 +0.043 0 4 x M4 x 0.7 thread depth

VND

24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41

VXD21/22/23

) 106 (116) N 25.5 28 28 M 82 (92) 93 (103) 98 (108) N M 82 (92) 93 (103) 98 (108) M 82 (92) 93 (103) 98 (108) Normally open Normally closed VXD2270 VXD2380 VXD2390 VXD2272 32A 40A 50A VXD2382 VXD2392 48 50 50 95 97 97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41