HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

KA

(mm) A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Rotary Table

Special tool dimensions [mm] Part number A B C D E P8910195 50 10 16 10 12 P8910295 60 12 18.2 11 14 P8910495 80 15 24 17 19 Special tool Fig. 7 -33- Piping Figure 8 and Table 12 show locations and sizes of piping ports. Ports can be selected from two sides. Plug the ports that are not used. Table 12.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

WX WX S D Standard piping/Centralized piping S Applicable O-ring WX Y S d 28 32 36 D 11.4 11.4 13.4 R 1.1 1.1 1.1 Model Bottom ported (Applicable O-ring) Y 2 x 2 x d Y MY1H25 MY1H32 MY1H40 6 6 8 7 9.5 11.5 9 11 14 C9 This figure shows the recommended machining dimensions of the mounting surface when viewed from the cylinder side.

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

Series 11-MXJ Air Slide Table

11-MXJ4 11-MXJ6 11-MXJ8 2 13 8 18 18 4.5 4.5 7 13 8 18 18 22 4.5 4.5 3.5 2.5 14 13 8 9 18 18 29 29 3.5 3.5 4.5 4.5 Auto Switch Mounting When using the solid state auto switch (D-M9), mount it in the illustrated direction.

LEF-OM007xx

-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector D D 40 40 Motor Controller type Vacuum

EXxx-OMN0035CN

9 Bit 11 Bit 13 Bit 15 (EX600-DYF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 4 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -43No.EX-OMN0035CN-A EX600-DYB EX600-DYE -44No.EX-OMN0035CN-A EX600-DYF -45No.EX-OMN0035CN-A EX600-DM E D-sub (25 ) 8 8 F (32 ) 8 8 P PNP N NPN EX600-DME No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () -46No.EX-OMN0035CN-A

Low Profile Air Gripper Series MHF2

25 MHF2-8DR 5.5 37 11 M3 x 0.5 MHF2-8D1R Axial piping port side 61 MHF2-8D2R C 38 MHF2-12DR 7 54 14.8 M5 x 0.8 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 9 76 19 M5 x 0.8 MHF2-16D1R ( Finger closing port) ( Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions not given above, please refer to the table of dimensions on pages 456 to 467. 10 94 23 M5 x 0.8 MHF2-20D1R 154 MHF2-20D2R

CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Free-Mounting Cylinder with Air Cushion Series CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Digital Pressure Switch ( compatible)

Dimensions M5 type 01/N01 type Piping specifications Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 -92No.PS-OMV0006-D Bracket mounting dimensions Bracket A Bracket B -93No.PS-OMV0006-D Mounting dimensions of panel mount adapter Mounting dimension of panel mount adapter + Front protective cover -94No.PS-OMV0006-D Panel cutout dimensions Mount individually More

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Series MHL2 112210, 16, 20, 25, 32, 40 Parallel Type Wide Opening Air Gripper How to Order 11 Vacuum suction type Clean series 11MHL 2 16 D 1 M9N 22MHL 2 16 D 1 M9N Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.

Line Filter

AMX-OMZ0092 PRODUCT NAME Line Filter MODEL / Series / Product Number AFF50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AFF60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1. Bowl assembly for AFF50 10 6-2.

Mist Separator

AMX-OMZ0093 PRODUCT NAME Mist Separator MODEL / Series / Product Number AM50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AM60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1. Bowl assembly for AM50 10 6-2.

Micro Mist Separator

AMX-OMZ0094 PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AMD50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AMD60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1.

Rotary Table

Output Power Current Load Load Current Applicable voltage consumption voltage current leakage load drop D-M9N D-M9NV D-M9NW D-M9NWV NPN DC28V type or less At 10mA DC512 0.8V or 100A or Relay 10mA 40mA less less at PLC 24V or less or less IC circuit D-M9P D-M9PV D-M9PW D-M9PWV DC24V (4.5 to 28V) At 40mA 2V or less PNP type D-M9B D-M9BV D-M9BW D-M9BWV DC24V DC24V 2.5 to 4V 0.8mA or less (DC10

NAAMS Standards Compliant

8F7 through +0.028 +0.013 D E E 200.03 F G F 10 200.03 10 G 300.025 300.025 11 through H 300.025 300.025 I 11 through H 250.05 J 250.05 I M6 x 1.0 45 R45 500.05 6.5 18 M6 x 1.0 10 750.05 3 R25 10 R6 1 1 6.5 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A010 ACA216M 80.0 65.0 50.0 90.0 56.0 0.5 CKZ-50A011 ACA217M 110.0 95.0 80.0 65.0 50.0 120.0