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NUZ322GOHOO-lt5 DIN connctor (D)/ NIf4|220-ODOO5 ftft E g !

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NUZ322GOHOO-lt5 DIN connctor (D)/ NIf4|220-ODOO5 ftft E g !

Refrigerated Thermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub9 (Male receptacle) P2: Serial RS-485 D-sub9 (Female receptacle) P1: Contact input/output D-sub25 (Female receptacle) Power cable entry E S O L C SMC N E P O Rear side 93 Series HRZ Operation Panel Display Description No.

2/3 Port Valve

Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

T

(mm) 12 3.2 4 6 8 10 D Tubing I.D.

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOd, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

,,: ,.

o Linseed Oil o o D a tr o o Lubricating Oil tr o tr tr o o o Machine Oil tr B D D D tr D D Methyl Alcohol D o o o o I I Methyl Ellryl Ketone o o o I o o Mineral Oil o D o tr tr tr o Motor Oil o o tr n o Naphtha o o o Nitrate 10oi0 I I I I I V V Ozone o o o o I V V Ozon Low Concenlration o tr o o Petroleum o o o o o tr Petroleum Oils a o tr o o D Soapy Water EI B o o o o B tr Sodium Chloride

125

for AC, since a rectifier prevents surge voltage generation. 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC Electrical entry D DIN terminal (Type D) With connector DO Without connector * DC specification of type D and DO is only available with 12 and 24 VDC.

KR

(mm) Model T (M) Mounting hole M Weight (g) Mounting plate thickness 11 mm or less Connection thread L H M14 x 1 M16 x 1 15 17 17 18.5 21 KRE10-00 24 M20 x 1 21 33 52 70 22 34.5 38 42.5 44 KRE08-00 KRE06-00 17 6 8 10 12 5.6 18.0 29.5 46.1 KRE12-00 27 M22 x 1 23 90 10.4 26.1 41.5 58.3 2-applicable tubing 19 D MS Plug: KRP Applicable fitting size d Model T A Weight (g) L D KRP-08 KRP-06 6 1

Water-cooledThermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub 9 (Male receptacle) P2: Serial RS-485 D-sub 9 (Female receptacle) P1: Contact input/output D-sub 25 (Female receptacle) Power cable entry Rear side 116 Common Specifications Series HRW Operation Display Panel q Description No.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

NAR Series

C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A t e n n o B C D A r e b m a h C F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A e d i u g e v l a V F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A F A 2 C A F A 2 C A F A 2 C A ) f g k (

V

O R T T H R E A D Nil PT* Remove (N) when ordering T NPTF T Y P E 1 Body Ported 3 Manifold Type Common SUP 5 Manifold Type Individual SUP Vacuum SERIES NZM VACUUM EJECTOR MANIFOLD D I M E N S I O N S NZM VA C U U M E J E C T O R M A N I F O L D 1 10 Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y

ZP

A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPR Replacement Parts

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

70pvvna

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1