Rotary Actuator/Vane Type

20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

6 r e w !4 o !5 u !0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !

NCQ8

Q J E D-rod Dia.

Air Slide Table

Extension stroke end adjuster Retraction stroke end adjuster 52 Air Slide Table Low Thrust with High Rigidity Type 6, 8, 12, 16, 20 MXQB Series RoHS How to Order B 30 ZA MXQ 12 M9BW q w e r t y u w Body option q Bore size e Standard stroke [mm] Standard type Symmetric type B BL 6 10, 20, 30, 40, 50*, 75* Port Port Switch mounting groove Switch mounting groove 8 10, 20, 30, 40, 50, 75*, 100

Stability of suction position,

w w t t w u t r r e r r r e e e q q q q q With set screw With male thread adapter (Vacuum inlet: Vertical) With female thread plate (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Lateral) Component Parts (Male thread) Component Parts (Female thread) No.

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

Step Motor Controller

Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F Note 4) Applicable to non-magnetizing lock. 24 Series LECP1 Controller Details e r Display Description Details No. t Power supply ON/Servo ON: Green turns on q q PWR Power supply LED Power supply ON/Servo OFF: Green flashes y w With alarm: Red turns on w ALM Alarm LED Parameter setting: Red flashes Change and protection of

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

Fieldbus System

w e q w e No.

MY1

Special resin Carbon steel Description No. q w e r t y u i o !

Stopper Cylinder

0 w q e r t u !

Rotary Actuator

CDRB2BW40-=S/D CDRB2BW20/30-=S/D CDRB2BW10/15-=S/D A port B port q e t e !2 q o !2 !0 !0 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i Component Parts Description Material Description Material No. No.

MGP

6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PE 20.3 29.4 P Exhaust part 8.4 17.7 0.8 107.5 Note 1) 10 (3.7) Circuit diagram 5 6 Q N 5 6 Q N Note 1) The above dimensions are for ZQ1 1U2 L-E G -00.

&snac

R e m o v e a n Y b t o c k o n b e n d o n t n e p u r q i n s a l r P i P i n s ' b . P l p i n s f o r p u r g i n g a i r i s r e d u c e o r t o n q e r t h a n s P e c i f i e d l e n q t n ' r e f e r t o P . 2 , 7 f o r c o r r e c t i o n ' c .

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Air Cylinder

1 CM2 w Bore size r Action e Cylinder standard stroke [mm] q Mounting CM3 Refer to Standard Strokes on page 96.

C85

1 y q r e i !2 o !