IZx-OMR0035

No.: IZ-OMR0035 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved 36

AMPSeries

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

AMP

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

VVX31/32/33

n-Rc , 4 1 8 1 LVH LVD LVQ Stations Symbol 2 96 84 126 108 3 132 120 172 154 4 168 156 218 200 5 204 192 264 246 6 240 228 310 292 7 276 264 356 338 8 312 300 402 384 9 348 336 448 430 10 384 372 494 476 Model L1 L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. How to Use Plug Connector Manual Operation Warning Caution SY Installation and removal of connector Connected actuator is started by manual operation. Use the manual override after confirming that there is no danger.

VY511, VYU5

.): DL10-02 P 250 700 200 600 176 Conditions Supply air pressure: 0.5MPa Load ratio: 50% 90 elbow: 4 pcs. When load ratio is 0% (no load), maximum driving speed is 1.2 times and when 75%, it is 0.7 times of these figures.

ZQ

power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How to Order ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01 02

S

One Way Trip 05 Straight Plunger 06 Roller Plunger 07 Cross Roller Plunger 08 Toggle 30 Push ButtonMushroom Push ButtonMushroom Lock Down (Red only) order Valve VM430-01-00 plus Actuator Type XT34 32 Push ButtonExtended 33 Push ButtonFlush 34 Twist Selector 36 Key Selector P U S H B U T T O N C O L O R R Red G Green B Black S Steel K E Y T O DIMENSIONAL T A B L E S S A F E T Y F.O.F.

Series VS

8 PILOT EXH PORTS A A B A B C SIZE 2 7 SIZE 3 9 2 MOUNTING HOLES SIZE 2 3/8 SIZE 3 1/2 5 PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15 to 40% ethylene glycol aqueous solution: Diluted with clean water, without any additives such as antiseptics. (Refer to "Operation at low ambient temperature or low circulating uid temperature" (page 186-1) for the concentration of the ethylene glycol aqueous solution.)

VM100F

plunger 07 Cross roller plunger 08 Toggle lever 30 Push button (Mushroom) 32 Push button (Extended) 33 Push button (Flush) 34 Twist selector (2-position) 36 Key selector (2-position) 35 Twist selector (3-position) Applicable tubing O.D.

Pressure Switch/Reed Switch Type

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003

Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

Exhaust Cleaner for Clean Rooms AMP Series

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

Body Size: 20, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: C [N.C.

Body Option: 0 (Internal Pilot), Port Size: 02 (Rc1/4), Style: 36 [Key Selector (2 Position)], Suffix: None [Or Polyacetal (Std) in Case of Roller Material), Accessory: F [Foot Bracket (Internal Pilot Type Only)]

Body Option: 1 (External Pilot), Port Size: 02 (Rc1/4), Style: 36 [Key Selector (2 Position)]

Body Option: 0 (Internal Pilot), Port Size: 02 (Rc1/4), Style: 36 [Key Selector (2 Position)]