MRHQ

22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4 (one each on three sides) 0 -0.062 47h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M5 x 0.8 depth 8 8 22 8 12 25 11 6 6 29 Side A Side B 41 12-11-14 15 Rotary Gripper Series MRHQ MRHQ20 A MHZ B 48 59 MHF 78 MHL MHR 38.5 4-M6 x 1 depth 10 51 MHK Courtesy of Steven

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AR20K io 60K Flor / drreclion: Bigh 10 leli AR10 to 60.

HRX-OM-Q026

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 8 Filter Rc1 20m Refer to the table below * Recommended filters for facility water inlet Applicable model Recommended filter HRSH100/150 FQ1012N-10-T020-B-X61 Note HRSH200/250 FGESA-10-T020A-G2 Note Note) The filter shown above cannot be directly connected to the thermo-chiller.

MHY2/MHW2

A part z1 m1 = 40 X 7 X 8 X 2.7 X 10-6 Calculation of weight m1 = a X b X c X Specific gravity = 0.006(kg) Iz1 = {0.006 X (40 2+7 2)/12} X 10-6 Moment of inertia around Z1 axis = 0.8 X 10-6 (kgm 2) = 0.8 X 10-6+ 0.006 X 37 2 X 10-6 Iz1 = {m1(a 2+ b 2)/12} X 10-6 IA = 9.0 X 10-6(kgm 2) Moment of inertia around Z axis IA = IZ1 + m1r1 2 X 10-6 z r2 Z2 B part r2 = 47(mm) m2 = 5 X 10 X 12 X

Pin Clamp Cylinders

(Cylinder stroke) 0 0.05 d 10 (Clamp stroke) Q Q SR Port side K B 120 C Mounting surface 8 to 10 26 12 48 67 10.5 (9) Port side C Mounting surface 14.5 15.5 30 Diamond cut shape (Guide pin dia.: 9.5 or more) Mounting surface 770.1 D 300.05 20 15 15 Port side (183) Clamp arm position 30 7.5 10.5 A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side

Short Stroke Electric Actuator Series LX

1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 1.3 0.3 0.1 2.6 1.3 0.3 0.1 80 80 1.3 0.7 0.2 0.1 1.3 0.7 0.2 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

3

Body material Port size Orifice diameter e VXS2 3 A w B 5 Body material C37 Port size 1/4 e A Orifice diameter 10 Step 3 Select electrical specification.

3-Position Rotary Table

10 10 90 42 27 45 31 49 190 10 10 80 35 35 62 39 66 190 10 10 65 30 39 68 43 72 190 10 10 50 24 49 83 53 87 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

HS Auto switch 36 12 24.5 SMC SMC A 33 B Auto switch 49.5 A B G 1/2 (applicable cable O.D. 6.8 to 11.5) Proper auto switch mounting positions (mm) D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, D-A34 D-A44 D-B5 D-B6 D-G5NTL D-H7F D-B59W Bore size (mm) A A B A A A A B A B B B B B 20 14 10 8.5 12 10.5 14 9 15 13 12 6.5 8.5 12 7 25 14.5 12.5 9.5 9 11 14.5 9.5 12.5 15.5 11.5

CUJ

(Example) CUJ-M3 x 27L A A C B B D Axial mounting Side mounting For axial mounting Without Auto Switch For side mounting Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 A B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 C D Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20

Wireless System

A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) *

Angle Seat Valve /

is b = 0.3.

Multi-Axis Step Motor Controller

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) 1 2 Cable length (L) [m] 15 16 Connector B Connector D (14.7) (30.7) L (11) 1 1.5 3 3 5 5 8 8*1 (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C A 10*1 Actuator side (Terminal no.)

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

LH 0.2 C B W W D E d d D E LY MM MM 4-LD Width across flats G Width across flats G LT LT NA NA Y X Y X LX B S + Stroke LS + Stroke ZZ + 2 strokes (mm) Bore size (mm) LD LH LS LT LX LY A a B B C d E F G GA J K M MA MM NA D H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 9 47 168 8 44 77 23 10 60 60 44 18 45

15

M3E Y m x g From the results above, Find the value M3Emax when Va = 350 mm/s from Graph (11) b. n = 0.72 1, so the cylinder can be used. n = 1 + 2 + 3A + 3B = 0.07 + 0.19 + 0.37 + 0.09 = 0.72 Judgement [Graph 5] Allowable load mass by stroke 25 [Graph 9] Allowable load mass on guides m 400 100 B 10 Load mass m [kg] Load mass m [kg] C CY3B CY3R 100 CY1S25-Z 1 y, Z = 100 CY1S CY1S 0.1 CY1L

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

NAAMS Standards Compliant

95.0 80.0 65.0 50.0 150.0 120.0 116.0 0.8 50 mm offset: Machined 25 mm offset: Machined A B A C B 6H6 through +0.008 0 D C E 6H6 through +0.008 0 D F 200.03 10 E G F 200.03 10 G 300.025 300.025 9 through H 300.025 300.025 I 250.05 9 through J H 250.05 I 45 M6 x 1.0 R45 500.05 M6 x 1.0 750.05 6.5 18 R25 10 3 10 1 1 6.5 R6 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1